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Method and system for measuring vibration of an object

  • US 6,792,811 B2
  • Filed: 03/04/2002
  • Issued: 09/21/2004
  • Est. Priority Date: 03/04/2002
  • Status: Expired due to Fees
First Claim
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1. A method for measuring vibration of an object having a pair of substantially coplanar, spaced-apart marks, the method comprising:

  • providing calibration data based on a correlation of a change in distance between the spaced-apart marks in a detector plane substantially parallel to the spaced-apart marks to physical movement of the object including the spaced-apart marks;

    generating a plurality of images including the spaced-apart marks from signals reflected from the object in the detector plane;

    measuring energy in the images in the detector plane to produce a plurality of signals; and

    processing the plurality of signals with the calibration data to obtain a vibration measurement of the object.

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