Plasma processing apparatus and method capable of performing uniform plasma treatment by control of excitation power

• US 6,792,889 B2
• Filed: 01/28/2003
• Issued: 09/21/2004
• Est. Priority Date: 01/30/2002
• Status: Active Grant

• Current Assignee: Alps Alpine Co., Ltd., Tadahiro Ohmi
• Original Assignee: ALPS Electric Company Limited (Alps Alpine Co., Ltd.), Tadahiro Ohmi
• Inventors: Ohmi, Tadahiro, Nakano, Akira
• Primary Examiner(s): Lee, Wilson
• Application Number:
  US10/353,760
• Publication Number:
  US 20030141821A1
• Time in Patent Office: 602 Days
• Field of Search: 156/345.1, 156/345-5-3, 156/345--34, 315/111.21, 315/111.71, 315/111.81, 315/111.91, 118/723.E, 118/723.MA
• US Class Current: 118/723.00E
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32183 Matching circuits

Abstract

A plasma processing apparatus includes a chassis accommodating an impedance matching circuit. The impedance matching circuit is placed between an RF generator and a plasma excitation electrode. Magnetic probes for detecting a magnetic field generated at a slit in a sidewall of the chassis are placed axisymmetrically. The plasma processing apparatus also includes a feedback circuit for feeding back to an RF generator or a matching circuit so that a current detected by a current-detecting unit maintains a predetermined value.

Claims

1. A plasma processing apparatus, comprising:

an electrode pair of a plasma excitation electrode for forming a plasma and a susceptor electrode facing the plasma excitation electrode, a workpiece to be plasma-treated being placed therebetween;

a plasma processing chamber accommodating the electrode pair;

an RF generator;

a feeding path for feeding RF power from the RF generator to the plasma excitation electrode;

an impedance matching circuit placed in the feeding path, wherein the impedance matching circuit matches the impedance between the RF generator and the plasma processing chamber;

a chassis accommodating the impedance matching circuit, wherein the chassis functions as part of a return path from the susceptor electrode to the RF generator; and

current-detecting means for detecting an RF current which returns from the susceptor electrode to the RF generator, the current-detecting means being provided in the chassis.

2. A plasma processing apparatus according to claim 1, wherein a plurality of the current-detecting means is provided in the chassis, and wherein the current-detecting means are placed axisymmetrically around the central axis of the chassis.

3. A plasma processing apparatus according to claim 2, wherein the each of the plurality of current detecting means is disposed on a low resistance conductive path disposed on a surface of the chassis.

4. A plasma processing apparatus according to claim 2, wherein the a cross-section of the chassis cut perpendicularly to the central axis thereof is a regular polygon and the plurality of current detecting means comprises a plurality of slits formed in the sidewalls of the chassis.

5. A plasma processing apparatus according to claim 4, wherein the plurality of slits are formed in the center of the sidewalls.

6. A plasma processing apparatus according to claim 1, wherein the current-detecting means includes:

a slit formed in the chassis and extending along a flow path of the RF current which returns to the RF generator; and

a magnetic field probe for detecting a magnetic field generated at the slit.

7. A plasma processing apparatus according to claim 6, wherein the width of the slit is λ

/100 or less, where λ

represents the wavelength of the RF current.

8. A plasma processing apparatus according to claim 6, wherein the width of the slit is λ

/1000 or less, where λ

represents the wavelength of the RF current.

9. A plasma processing apparatus according to claim 6, wherein the magnetic field probe is arranged in the slit.

10. A plasma processing apparatus according to claim 1, wherein a cross-section of the chassis cut perpendicularly to the central axis thereof is one of a regular polygon or a circle.

11. A plasma processing apparatus according to claim 1, wherein the plasma processing chamber is symmetrical with respect to an axis, and the axis coincides with the central axis of the chassis.

12. A plasma processing apparatus according to claim 1, wherein the susceptor electrode is symmetrical with respect to an axis, and the axis coincides with the central axis of the chassis.

13. A plasma processing apparatus according to claim 1, wherein the chassis includes a housing portion enclosing the plasma processing chamber.

14. A plasma processing apparatus according to claim 13, wherein the current-detecting means are provided in the housing portion of the chassis.

15. A plasma processing apparatus, comprising:

a plasma processing chamber having an electrode for exciting a plasma;

an RF generator for supplying RF power to the electrode;

a matching circuit for impedance matching between the plasma processing chamber and the RF generator, the matching circuit including an input terminal connected to the RF generator with an RF supplier therebetween and an output terminal connected to the electrode with an RF feeder therebetween, wherein a ground potential portion is connected between the input and output terminals;

current-detecting means for monitoring a current flowing in the RF feeder;

control means for controlling an output of the RF generator so that a current value detected by the current-detecting means maintains a predetermined value; and

a feedback circuit for feeding back to one of the RF generator and the matching circuit a control signal from the control means to adjust the electric power applied to the electrode for exciting the plasma.

16. A plasma processing apparatus according to claim 15, wherein the current-detecting means comprises a current probe.

17. A plasma processing method using a plasma processing apparatus, comprising:

applying electric power to an electrode for exciting a plasma to maintain a predetermined value; and

monitoring by a current-detecting unit provided in the chassis the current that returns from the susceptor electrode to the RF generator;

wherein the electric power applied to the electrode for exciting the plasma is controlled so that the current detected by the current-detecting unit maintains a predetermined value, and

wherein the control circuit is configured to send a control signal responsive to the difference between a predetermined current value and a current detected by the current-detecting means.

18. A plasma processing apparatus, comprising:

a plasma processing chamber accommodating a plasma excitation electrode and a susceptor electrode;

an RF generator;

a feeding path for feeding RF power from the RF generator to the plasma excitation electrode;

an impedance matching circuit placed in the feeding path, wherein the impedance matching circuit matches the impedance between the RF generator and the plasma processing chamber;

a chassis enclosing the impedance matching circuit, wherein the chassis functions as part of a return path from the susceptor electrode to the RF generator; and

a current-detector configured to detect an RF current which returns from the susceptor electrode to the RF generator, the current-detector being provided in the chassis.

19. A plasma processing method in a system including an electrode pair of a plasma excitation electrode for forming a plasma and a susceptor electrode facing the plasma excitation electrode, a workpiece to be plasma-treated being placed therebetween;

a plasma processing chamber accommodating the electrode pair; and

an RF generator, the method comprising;

feeding RF power from the RF generator to the plasma excitation electrode in a feeding path;

matching the impedance between the RF generator and the plasma processing chamber in the feeding path;

providing a return path from the susceptor electrode to the RF generator; and

detecting an RF current which returns from the susceptor electrode to the RF generator in the return path.