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Micro-electro-mechanical device and method of making

  • US 6,794,101 B2
  • Filed: 05/31/2002
  • Issued: 09/21/2004
  • Est. Priority Date: 05/31/2002
  • Status: Expired due to Term
First Claim
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1. A micro-electro-mechanical device comprising:

  • a substrate;

    a first conductive layer over the substrate;

    a second conductive layer over the substrate and separated from the first conductive layer;

    a cantilever structure over the substrate, wherein the cantilever structure has a first end anchored to the substrate and a second end suspended over the substrate; and

    a shorting bar adjacent to the cantilever structure, wherein the shorting bar has a first portion and a second portion, wherein;

    the first portion is anchored to and electrically coupled to the first conductive layer;

    the second portion overlies and is removably electrically coupled to the second conductive layer; and

    the shorting bar does not comprise an insulating material.

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