Method and apparatus for treating low k dielectric layers to reduce diffusion

• US 6,794,311 B2
• Filed: 07/10/2001
• Issued: 09/21/2004
• Est. Priority Date: 07/14/2000
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Huang, Kegang, Xu, Ping, Huang, Judy H
• Primary Examiner(s): Lebentritt, Michael
• Application Number:
  US09/902,518
• Publication Number:
  US 20020016085A1
• Time in Patent Office: 1,169 Days
• Field of Search: 438/761, 438/931, 438/597, 438/624, 438/763, 438/780, 438/781, 438/787, 438/788, 438/623, 438/626, 438/637, 438/627, 438/758, 438/769, 438/445, 438/660, 438/636, 438/691, 438/612
• US Class Current: 438/761
• CPC Class Codes: C23C 16/325 Silicon carbide
• CPC Class Codes: C23C 16/56 After-treatment
• CPC Class Codes: H01L 21/0214 the material being a silicon oxynitride, e.g. SiON or SiON:H
• CPC Class Codes: H01L 21/02167 the material being a silicon carbide not containing oxygen, e.g. SiC, SiC:H or silicon carbonitrides H01L21/02126 and H01L21/0214 take precedence
• CPC Class Codes: H01L 21/02211 the compound being a silane, e.g. disilane, methylsilane or chlorosilane
• CPC Class Codes: H01L 21/02252 formation by plasma treatment, e.g. plasma oxidation of the substrate after treatment of an insulating film by plasma H01L21/3105 and subgroups
• CPC Class Codes: H01L 21/0234 treatment by exposure to a plasma
• CPC Class Codes: H01L 21/3105 After-treatment
• CPC Class Codes: H01L 21/314 Inorganic layers H01L21/3105, H01L21/32 take precedence
• CPC Class Codes: H01L 21/318 composed of nitrides
• CPC Class Codes: H01L 21/3185 of siliconnitrides
• CPC Class Codes: H01L 21/76826 by contacting the layer with gases, liquids or plasmas
• CPC Class Codes: H01L 21/76828 thermal treatment
• CPC Class Codes: H01L 21/76829 characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
• CPC Class Codes: H01L 21/76832 Multiple layers
• CPC Class Codes: Y10S 438/931 Silicon carbide semiconductor

Abstract

Methods and apparatus for depositing low dielectric constant layers that are resistant to oxygen diffusion and have low oxygen contents are provided. The layers may be formed by exposing a low dielectric constant layer to a plasma of an inert gas to densify the low dielectric constant layer, by exposing the low dielectric constant layer to a nitrating plasma to form a passivating nitride surface on the layer, or by depositing a thin passivating layer on the low dielectric constant layer to reduce oxygen diffusion therein. The low dielectric constant layer may be deposited and treated in situ.

Claims

1. A method for processing a substrate, comprising:

depositing a low dielectric constant layer on the substrate in a processing chamber by a plasma enhanced chemical vapor deposition process; and

treating the low dielectric constant layer with an in situ passivating process comprising;

introducing a nitrating gas selected from the group consisting of ammonia, nitrogen, nitrous oxide, and combinations thereof, into the processing chamber;

generating a plasma of the processing gas in the processing chamber; and

exposing the low dielectric constant layer to the plasma of the processing gas.

2. The method of claim 1, wherein the nitrating gas forms a nitrided surface on the low dielectric constant layer.

3. The method of claim 1, wherein the low dielectric constant layer is exposed to the plasma for between about 10 and about 120 seconds.

4. The method of claim 1, wherein the low dielectric constant layer comprises silicon carbide.

5. The method of claim 1, wherein the low dielectric constant layer has an oxygen content of about 6% or less by atomic concentration.

24. The method of claim 1, wherein exposing the low dielectric constant layer to the plasma comprises supplying a power density between about 0.08 watts/cm² and about 6.4 watts/cm² to the processing chamber to generate the plasma.

25. The method of claim 24, wherein the low dielectric constant layer is exposed to the plasma for between about 10 and about 120 seconds.

26. The method of claim 1, wherein processing the substrate comprises introducing a processing gas comprising a nitrating gas into the processing chamber at a flow rate of about 3000 sccm or less, maintaining the processing chamber at a pressure of between about 1 Torr and about 12 Torr, generating the plasma by supplying a power density between about 0.3 watts/cm² and about 3.3 watts/cm² to the processing chamber, and maintaining the plasma between about 20 and about 60 seconds.

27. The method of claim 26, wherein the low dielectric constant layer has an oxygen content of about 6% or less by atomic concentration.

6. A method for processing a substrate, comprising:

depositing a silicon carbide layer on the substrate in a processing chamber;

introducing a processing gas comprising a nitrating gas into the processing chamber;

generating a plasma of the processing gas in the processing chamber; and

modifying a surface of the silicon carbide layer by exposing the silicon carbide layer to the plasma of the processing gas to form a passivating surface on the silicon carbide layer.

7. The method of claim 6, wherein the processing gas further comprises an inert gas selected from the group consisting of helium, argon, and combinations thereof.

8. The method of claim 6, wherein the density of the surface of the silicon carbide layer is increased.

9. The method of claim 6, wherein the nitrating gas is selected from the group consisting of ammonia, nitrogen, nitrous oxide, and combinations thereof.

10. The method of claim 6, wherein the processing gas comprises a nitrating gas and a nitrided surface is formed on the low dielectric constant layer.

11. The method of claim 6, wherein exposing the low dielectric constant layer to the plasma comprises supplying a power density between about 0.3 watts/cm² and about 3.2 watts/cm² to the processing chamber to generate the plasma.

12. The method of claim 11, wherein the low dielectric constant layer is exposed to the plasma for between about 20 and about 60 seconds.

13. The method of claim 6, wherein the chamber pressure is between about 1 Torr and about 12 Torr.

14. The method of claim 6, wherein processing the substrate comprises introducing a processing gas comprising a nitrating gas into the processing chamber at a flow rate of about 3000 sccm or less, maintaining the processing chamber at a pressure of between about 5 Torr and about 10 Torr, generating the plasma by supplying a power density between about 1.2 watts/cm² and about 1.6 watts/cm² to the processing chamber, and maintaining the plasma between about 20 and about 60 seconds.

15. The method of claim 6, wherein the silicon carbide layer is a barrier layer, an etch stop, a passivation layer, or an anti-reflective coating.

16. The method of claim 6, wherein the silicon carbide layer has an oxygen content of about 6% or less by atomic concentration.

29. The method of claim 6, wherein modifying a surface of the silicon carbide layer is performed in situ with depositing the silicon carbide layer.

17. A method for forming a low dielectric constant barrier layer on a substrate, comprising:

depositing a silicon carbide layer on the substrate; and

depositing a passivating layer comprising silicon and nitrogen on the silicon carbide layer by a process comprising;

introducing a silicon containing gas and a nitrogen containing gas into a process chamber containing the substrate;

initiating a plasma in the process chamber; and

reacting the silicon containing gas and the nitrogen containing gas in the presence of the plasma to deposit the passivating layer comprising silicon and nitrogen.

18. The method of claim 17, wherein the passivating layer comprises silicon nitride or silicon oxynitride.

19. The method of claim 17, wherein the silicon containing gas is selected from the group of silane, methylsilane, trimethylsilane, substituted derivatives thereof, and combinations thereof.

20. The method of claim 17, wherein the nitrogen containing gas is selected from the group consisting of ammonia, nitrogen, nitrous oxide, and combinations thereof.

21. The method of claim 17, wherein the plasma is generated by supplying a power density between about 0.3 watts/cm² and about 3.2 watts/cm² to the chamber.

22. The method of claim 17, wherein the chamber pressure is between about 1 Torr and about 25 Torr.

23. The method of claim 17, wherein the passivating layer comprising silicon and nitrogen is deposited at a thickness between about 25 Å

and about 500 Å

.

28. The method of claim 17, wherein depositing the passivation layer is performed in situ with depositing the silicon carbide layer.