Fluid-based switches

• US 6,794,591 B1
• Filed: 04/14/2003
• Issued: 09/21/2004
• Est. Priority Date: 04/14/2003
• Status: Expired due to Fees

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Wong, Marvin Glenn
• Primary Examiner(s): Friedhofer, Michael A.
• Application Number:
  US10/414,063
• Time in Patent Office: 526 Days
• Field of Search: 200/182, 200/187-189, 200/209-219, 200/233-236, 310/328, 310/331, 310/348, 310/363, 335/4, 335/47, 335/78, 385/19
• US Class Current: 200/182
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 2029/008 using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
• CPC Class Codes: H01H 2061/006 Micromechanical thermal relay
• CPC Class Codes: H01H 29/28 with level of surface of contact liquid displaced by fluid pressure
• CPC Class Codes: H01H 57/00 Electrostrictive relays; Piezoelectric relays

Abstract

Fluid-based switches are disclosed. In one embodiment, the switch comprises first and second mated substrates defining therebetween at least portions of a number of cavities, the first substrate defining a plurality of indentations defined within a first one of the cavities, a plurality of electrical contacts, each electrical contact deposited within one of the indentations, a switching fluid, held within the first cavity, that serves to open and close at least a pair of the plurality of electrical contacts in response to forces that are applied to the switching fluid, and an actuating fluid, held within one or more of the cavities, that applies the forces to the switching fluid.

Claims

1. A switch comprising:

first and second mated substrates defining therebetween at least portions of a number of cavities, the first substrate defining a plurality of indentations defined within a first one of the cavities;

a plurality of electrical contacts, each electrical contact deposited within one of the indentations;

a switching fluid, held within the first cavity, that serves to open and close at least a pair of the plurality of electrical contacts in response to forces that are applied to the switching fluid; and

an actuating fluid, held within one or more of the cavities, that applies the forces to the switching fluid.

2. The switch of claim 1, further comprising a plurality of seal belts deposited on the second substrate at a location within the first cavity.

3. The switch of claim 2, wherein the second substrate defines a plurality of indentations and the seal belts are deposited within the indentations.

4. The switch of claim 1, wherein the first substrate comprises glass.

5. The switch of claim 1, wherein the first substrate comprises ceramic.

6. The switch of claim 1, wherein the indentations are sandblasted in the first substrate.

7. The switch of claim 1, wherein the indentations are laser cut in the first substrate.

8. The switch of claim 1, wherein the indentations are chemically etched in the first substrate.

9. The switch of claim 1, wherein the first substrate includes a first layer and a second layer, the first layer having the plurality of electrical contacts deposited thereon, and the second layer defining a number of ducts, each duct of the second layer leading from the first cavity to one of the electrical contacts deposited on the first layer, the second layer further defining the plurality of indentations, each indentation defined at an opening of one of the ducts at the surface of the second layer, the indentations having a diameter that is larger than that of the ducts at the surface of the second layer.

10. The switch of claim 9, wherein at least one of the ducts defined by the second layer is defined so that a portion of the switching fluid remains in the duct when the forces are applied to the switching fluid to close pairs of the electrical contacts.

11. A switch comprising:

first and second mated substrates defining therebetween at least portions of a number of cavites, at least one of the substrates defining a plurality of indentations defined within a first one of the cavities;

a plurality of wettable pads, each wettable pad deposited within one of the indentations;

a switching fluid, wettable to said pads and held within the first cavity, that serves to open and block light paths through the first cavity in response to forces that are applied to the switching fluid; and

an actuating fluid, held within one or more of the cavities, that applies the forces to said switching fluid.

12. The switch of claim 11, further comprising a plurality of seal belts deposited on the second substrate at a location within the first cavity.

13. The switch of claim 11, wherein the second substrate defines a plurality of indentations and the seal belts are deposited within the indentations.

14. The switch of claim 11, wherein the first substrate comprises glass.

15. The switch of claim 11, wherein the first substrate comprises ceramic.

16. The switch of claim 11, wherein the indentations are sandblasted in the first substrate.

17. The switch of claim 11, wherein the indentations are laser cut in the first substrate.

18. The switch of claim 11, wherein the indentations are chemically etched in the first substrate.

19. The switch of claim 11, wherein the first substrate includes a first layer and a second layer, the first layer having the plurality of electrical contacts deposited thereon, and the second layer defining a number of ducts, each duct of the second layer leading from the first cavity to one of the electrical contacts deposited on the first layer, the second layer further defining the plurality of indentations, each indentation defined at an opening of one of the ducts at the surface of the second layer, the indentations having a diameter that is larger than that of the ducts at the surface of the second layer.

20. The switch of claim 19, wherein at least one of the ducts defined by the second layer is defined so that a portion of the switching fluid remains in the duct when the forces are applied to the switching fluid to close pairs of the electrical contacts.

21. A switch, comprising:

first and second mated substrates defining therebetween at least portions of a number of cavities;

a switching fluid, held within one or more of the cavities, that is movable between at least first and second switch states in response to forces that are applied to the switching fluid; and

a plurality of seal belts deposited within indentations on one of the substrates at a location within one or more of the cavities holding the switching fluid.

22. The switch of claim 21, wherein the indentations are laser cut in one of the substrates.

23. The switch of claim 21, wherein the indentations are sandblasted in one of the substrates.

24. The switch of claim 21, wherein the indentations are chemically etched in one of the substrates.