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Solid state optical shutter

  • US 6,794,628 B2
  • Filed: 07/31/2002
  • Issued: 09/21/2004
  • Est. Priority Date: 01/03/2000
  • Status: Expired due to Term
First Claim
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1. A method of producing an optoelectronic circuit comprising:

  • forming a first optoelectronic element of the circuit on a first surface of a semiconductor substrate;

    forming a second optoelectronic element of the circuit on a second surface of the semiconductor substrate; and

    wherein the first and second optoelectronic elements communicate via current transmitted through the substrate.

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