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Optical switch

  • US 6,795,603 B2
  • Filed: 07/16/2002
  • Issued: 09/21/2004
  • Est. Priority Date: 07/18/2001
  • Status: Expired due to Fees
First Claim
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1. An optical switch for connecting and switching optical paths of a plurality of optical signals, comprising an optical device and an electrostatic actuator for driving said optical device;

  • said optical device being pivotally borne so as to allow rotation around a prescribed center of rotation and said electrostatic actuator including a substrate that holds said optical device and a plurality of driving electrodes mounted on said substrate;

    whereinan electrostatic voltage that is applied between said optical device and said driving electrodes generates an electrostatic driving torque for causing said optical device to tilt with respect to said substrate around said center of rotation, whereby the direction of reflection of said optical signal is changed; and

    wherein;

    said plurality of driving electrodes are formed in at least two pairs arranged in a single radial pattern around an electrode center, said electrode center being the orthogonal projection of said center of rotation onto said substrate surface; and

    said plurality of driving electrodes are each formed in a shape in which the electrode width of a prescribed outer portion relative to said electrode center narrows with progression toward the outside, all of said driving electrodes have a same shape.

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