×

Angular velocity sensor

  • US 6,796,180 B2
  • Filed: 04/10/2002
  • Issued: 09/28/2004
  • Est. Priority Date: 04/11/2001
  • Status: Expired due to Fees
First Claim
Patent Images

1. An angular velocity sensor comprising:

  • a base;

    a vibrator;

    a spring device for connecting the vibrator to the base such that a driving vibration can be applied to the vibrator in a first direction and such that the vibrator produces a detecting vibration in a second direction, which is perpendicular to the first direction; and

    a detecting electrode opposed to the vibrator, wherein, when an angular velocity is applied to the sensor while the vibrator receives the driving vibration, a change in capacitance between the vibrator and the detecting electrode is produced as a result of the detecting vibration, and the detecting electrode permits the change in capacitance to be detected, wherein a degree of detuning α

    is expressed by fd/fs, where fd is a resonance frequency of the driving vibration and fs is a resonance frequency in the detecting vibration, and a term Qs, which is expressed by (m·

    k)1/2/c, where m is the mass of the vibrator and k is the spring constant of the spring device, and c is an attenuation coefficient of the vibrator, satisfy a relationship expressed by the following expression;

    α



    5.720×

    10-9·

    Q






    s6
    -1.012×

    10-6·

    Q






    s5
    +7.102×

    10-5·

    Q






    s4
    -2.517×

    10-3·

    Q






    s3
    +4.736×

    10-2·

    Q






    s2
    -4.549×

    10-1·

    Q






    s
    +2.923
    embedded image

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×