Using hydrogen gas in a post-etch radio frequency-plasma contact cleaning process

• US 6,796,314 B1
• Filed: 09/07/2001
• Issued: 09/28/2004
• Est. Priority Date: 09/07/2001
• Status: Expired due to Fees

• Current Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Original Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Inventors: Graff, Wesley P.
• Primary Examiner(s): Markoff, Alexander
• Application Number:
  US09/949,326
• Time in Patent Office: 1,117 Days
• Field of Search: 134/1, 134/1.1, 134/1.2, 134/1.3, 438/906, 216/67, 216/68, 216/69, 216/72, 216/74, 216/75, 216/77, 216/78, 216/79, 216/80
• US Class Current: 134/1.2
• CPC Class Codes: B08B 7/00 Cleaning by methods not provided for in a single other subclass or a single group in this subclass
• CPC Class Codes: H01L 21/02046 Dry cleaning only H01L21/02085 takes precedence
• CPC Class Codes: H01L 21/02063 the processing being the formation of vias or contact holes
• CPC Class Codes: H01L 21/31116 by dry-etching
• CPC Class Codes: H01L 21/76805 the opening being a via or contact hole penetrating the underlying conductor
• CPC Class Codes: H01L 21/76814 post-treatment or after-treatment, e.g. cleaning or removal of oxides on underlying conductors

Abstract

Provided is a method for removing etch byproducts inside a contact hole while minimizing lateral etching of the contact hole. After an etching process, a wafer having a contact hole is placed inside a plasma reaction chamber. The contact hole contains etch byproducts that may degrade the quality of electrical connections. A radio frequency (RF) source creates a RF field inside the reaction chamber. A gas mixture containing chemicals that are reactive with the etch byproducts is introduced into the reaction chamber. The gas mixture becomes ionized by the RF field and reacts with the etch byproducts in the contact hole, removing the etch byproducts. The gas mixture may include approximately 10-60 vol. % hydrogen gas, a gas that reacts with the etch byproducts (e.g., NF₃), and nitrogen. The hydrogen gas at least significantly reduces lateral etching of the contact hole by the reactive gas.

Claims

1. A method of cleaning byproducts from a semiconductor structure, said semiconductor structure comprising:

a first layer consisting essentially of borophosphosilicate glass (BPSG) formed on top of a second layer consisting essentially of silicon, and

a contact hole formed by etching through said first layer to said second layer, said byproducts being formed by said etching and being located in said contact hole, said byproducts comprising silicon-containing residues and damaged silicon;

said method comprising;

providing a reaction chamber, said reaction chamber comprising a platen;

placing said structure on said platen;

creating a plasma, said plasma comprising a gas mixture, said gas mixture comprising hydrogen gas and a fluorine gas; and

causing said plasma to contact said byproducts.

2. The method of claim 1, wherein the depth of said contact hole is at least 10 times the width of said contact hole.

3. The method of claim 1, further comprising maintaining said platen at a temperature of about 5-40 degrees Celsius while said plasma is contacting said byproducts.

4. The method of claim 1, further comprising maintaining a pressure of about 250-1000 mTorr in said reaction chamber while said plasma is contacting said byproducts.

5. The method of claim 1, wherein said hydrogen gas retards the etch rate of said first layer more than said hydrogen retards the etch rate of said byproduct.

6. The method of claim 5, wherein an etch rate of said residues is from 1.25 to 1.55 times an etch rate of said first layer.

7. The method of claim 1, wherein said gas mixture comprises approximately 10% to approximately 60% hydrogen gas.

8. The method of claim 1, wherein said creating a plasma comprises delivering approximately 200 to approximately 500 sccm of hydrogen gas.

9. The method of claim 1, wherein said creating a plasma comprises delivering approximately 5 to approximately 30 sccm of NF₃ gas.

10. The method of claim 1, further comprising delivering N₂ to said chamber at approximately the same flowrate as hydrogen gas.

11. The method of claim 1, wherein said creating a plasma takes place in a radio frequency plasma reaction chamber.

12. The method of claim 11, wherein said radio frequency plasma reaction chamber comprises:

a platen coupled to a radio frequency source that creates a radio frequency field inside said reaction chamber;

a gas distribution plate through which gases are introduced into said reaction chamber to become ionized by said radio frequency field; and

a vacuum pump for controlling the pressure inside said reaction chamber.

13. The method of claim 12, wherein said reaction chamber further comprises a means for controlling the temperature of said platen.

14. The method of claim 1, wherein said creating a plasma comprises introducing said hydrogen gas at a flowrate of about 200-500 sccm, introducing NF₃ at a flowrate of about 30 sccm, and introducing N₂ at a flowrate of about 200-500 sccm.

15. A method of cleaning byproducts from a semiconductor structure, said semiconductor structure comprising:

a first layer formed on top of a second layer, said first layer consisting essentially of a material selected from the group consisting of phosphosilicate glass (PSG), borosilicate glass (BSG), borophosphosilicate glass (BPSG), and spin-on-glass, said second layer consisting essentially of silicon, and

a contact hole formed by etching through said first layer to said second layer, said byproducts being formed by said etching and being located in said contact hole, said by products comprising silicon-containing residues and damaged silicon;

said method comprising;

providing a reaction chamber, said reaction chamber comprising a platen;

placing said structure on said platen;

creating a plasma, said plasma comprising a gas mixture, said gas mixture comprising hydrogen gas and a fluorine gas; and

causing said plasma to contact said byproducts.

16. A method of cleaning byproducts from a semiconductor structure, said semiconductor structure comprising:

a first layer consisting essentially of silicon nitride formed on top of a second layer consisting essentially of silicon,

a third layer consisting essentially of borophosphosilicate glass (BPSG) formed on top of said first layer, and

a contact hole formed by etching through said first and third layers to said second layer, said byproducts being formed by said etching and being located in said contact hole, said by products comprising silicon-containing residues and damaged silicon;

said method comprising;

providing a reaction chamber, said reaction chamber comprising a platen;

placing said structure on said platen;

creating a plasma, said plasma comprising a gas mixture, said gas mixture comprising hydrogen gas and a fluorine gas; and

causing said plasma to contact said byproducts.