Laser ablation nozzle assembly

• US 6,797,919 B1
• Filed: 09/29/2003
• Issued: 09/28/2004
• Est. Priority Date: 12/20/2002
• Status: Expired due to Term

• Current Assignee: Pictiva Displays International Limited (f/k/a Dolya Holdco 5 Limited) (Key Patent Innovations Limited)
• Original Assignee: Osram Opto Semiconductors GmbH (Ams-Osram AG)
• Inventors: Pichler, Karl, Millard, Ian
• Primary Examiner(s): Heinrich, Samuel M.
• Application Number:
  US10/673,588
• Time in Patent Office: 365 Days
• Field of Search: 219/121.84, 219/121.6, 219/121.63, 219/121.65, 219/121.67, 219/121.68, 219/121.7
• US Class Current: 219/121.84
• CPC Class Codes: B23K 26/123 in an atmosphere of particular gases
• CPC Class Codes: B23K 26/142 for the removal of by-products
• CPC Class Codes: B23K 26/1436 for pressure control
• CPC Class Codes: B23K 26/1476 Features inside the nozzle for feeding the fluid stream through the nozzle

Abstract

A laser ablation system includes a first embodiment of a nozzle assembly where a laser beam is emitted through the nozzle assembly to remove materials on a target. The nozzle assembly includes a nozzle having a top end, and a window placed on the top end of the nozzle. The window includes one or more apertures and the laser beam is emitted through one of those apertures.

Another laser ablation system includes a second embodiment of a nozzle assembly where a laser beam is emitted through the nozzle assembly to remove materials on a target. The nozzle assembly includes a nozzle having one or more channels at a top end of the nozzle. The nozzle assembly also includes a window that is placed on the one or more channels. A gas flows through the one or more channels and that gas flow reduces debris deposition on the window.

Yet another laser ablation system includes a third embodiment of a nozzle assembly that includes a nozzle that has a central channel aligned longitudinally through which said laser beam travels from a top end of said nozzle to a bottom end of said nozzle. In this embodiment, the central channel of the nozzle is threaded.

Claims

1. Within a laser ablation system, a nozzle assembly and a laser beam that travels through said nozzle assembly to remove materials on a target, said nozzle assembly comprising:

a nozzle having at least one channel at a top end of said nozzle;

a window on said at least one channel; and

a gas that flows through said at least one channel,

wherein said gas flow reduces debris deposition on said window.

2. The nozzle assembly of claim 1 further comprising

at least one exit channel on a side of said nozzle through which said gas evacuates from said nozzle.

3. The nozzle assembly of claim 1 wherein said gas is any one of nitrogen, argon, air, dry air, or a mixture of gasses.

4. The nozzle assembly of claim 1 wherein said window includes at least one aperture.

5. Within a laser ablation system, a method to reduce debris deposition on a window, comprising:

moving a gas through at least one channel that contacts said window to reduce accumulation of said debris on said window.

6. The method of claim 5 further comprising

evacuating said gas from said at least one channel.

7. Within a laser ablation system, a nozzle assembly and a laser beam that is emitted through said nozzle assembly to remove materials on a target, said nozzle assembly comprising:

a nozzle that includes a central channel through which said laser beam travels from a top end of said nozzle to a bottom end of said nozzle; and

a window on said top end of said nozzle,

wherein said central channel is threaded.

8. The nozzle assembly of claim 7 wherein said nozzle includes at least one channel at said top end of said nozzle, and wherein said window is in contact with said at least one channel, and further comprising a gas that flows through said at least one channel, wherein said at least one channel is threaded.

9. The nozzle assembly of claim 8 further comprising

at least one vacuum channel on a side of said nozzle, said at least one vacuum channel evacuates said gas from said threaded central channel; and at least one exit channel on said side of said nozzle, said at least one exit channel evacuates said gas from said at least one threaded channel.

10. The nozzle assembly of claim 7 wherein said window includes at least one aperture.

11. The nozzle assembly of claim 8 wherein said gas is any one of nitrogen, argon, air, dry air, or a mixture of gasses.