Systems and methods for overcoming stiction
First Claim
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1. An electro-mechanical system, the system comprising:
- a structural plate in contact with a stop; and
an actuator activated by an alternating force for creating an oscillating movement of the stop relative to the structural plate, wherein the oscillating movement is sufficient to overcome stiction forces between the structural plate and the stop.
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Abstract
A number of methods and systems for overcoming stiction are provided. The systems include electro-mechanical systems capable of exerting a variety of forces upon areas prone to stiction. The systems can be MEMS arrays or other types of devices where stiction related forces occur. The methods include a variety of ways of causing movement in areas prone to stiction forces. Such movement can be vibrational in nature and is sufficient to overcome stiction, allowing a trapped element to be moveed to a desired location.
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Citations
9 Claims
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1. An electro-mechanical system, the system comprising:
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a structural plate in contact with a stop; and
an actuator activated by an alternating force for creating an oscillating movement of the stop relative to the structural plate, wherein the oscillating movement is sufficient to overcome stiction forces between the structural plate and the stop. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification