Multiple local probe measuring device and method
First Claim
1. A method of effecting local measurements referring to a sample, comprising:
- providing at least two probes in a positional relation with respect to a sample or a reference surface, adjusting a respective measurement condition for at least one of the probes on the basis of measurements effected with respect to at least one other of the probes, and effecting a measurement with respect said at least one of the probes with reference to said measurements effected with respect to said at least one other of the probes, wherein at least one of the measurement conditions is roughly adjusted on the basis of the measurement of at least one of the probes and is finely adjusted on the basis of the measurement of at least one other of the probes.
0 Assignments
0 Petitions
Accused Products
Abstract
The invention provides a probe measuring device for effecting local measurements referring to a sample, having a first probe and a second probe, a measurement condition adjustment arrangement adapted to commonly adjust a first measurement condition of the first probe with respect to a sample or a reference surface and a second measurement condition of the second probe with respect to a sample or a reference surface, a detection arrangement having a first detection arrangement associated with the first probe adapted to independently detect first measurement data referring to local measurements effected by the first probe and a second detection arrangement associated with the second probe adapted to independently detect second measurement data referring to local measurements effected by the second probe. Also provided are methods for effecting local measurements and local manipulations using multiple probes.
-
Citations
59 Claims
-
1. A method of effecting local measurements referring to a sample, comprising:
-
providing at least two probes in a positional relation with respect to a sample or a reference surface, adjusting a respective measurement condition for at least one of the probes on the basis of measurements effected with respect to at least one other of the probes, and effecting a measurement with respect said at least one of the probes with reference to said measurements effected with respect to said at least one other of the probes, wherein at least one of the measurement conditions is roughly adjusted on the basis of the measurement of at least one of the probes and is finely adjusted on the basis of the measurement of at least one other of the probes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
-
-
28. A method of effecting local manipulations referring to a sample, comprising;
-
providing at least two probes in a positional relation with respect to a sample or a reference surface, adjusting a respective manipulation condition for at least one of the probes on the basis of measurements effected with respect to at least one other of the probes, and manipulating said sample by means of said at least one of the probes with reference to said measurements effected with respect to said at least one other of the probes, wherein at least one of the manipulation conditions is roughly adjusted on the basis of the measurement of at least one of the probes and is finely adjusted on the basis of the measurement of at least one other of the probes. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45)
-
-
46. A method of effecting local measurements referring to a sample, comprising:
-
providing at least two probes in a positional relation with respect to a sample or a reference surface, adjusting a respective measurement condition for at least one of the probes on the basis of measurements effected with respect to at least one other of the probes according to at least one time constant, and effecting a measurement with respect said at least one of the probes with reference to said measurements effected with respect to said at least one other of the probes.
-
-
47. A method of effecting local measurements referring to a sample, comprising:
-
providing at least two probes in a positional relation with respect to a sample or a reference surface, adjusting a respective measurement condition for at least one of the probes on the basis of measurement effected with respect to said at least one of the probes, and obtaining measurements for the resulting measurement condition for at least one of the other probes, wherein the measurements for said at least one of the probes are a function of the measurements for said at least one of the other probes.
-
-
48. A method of effecting local measurements referring to a sample, comprising:
-
providing at least two probes in a positional relation with respect to a sample or a reference surface, adjusting a respective measurement condition for at least one of the probes on the basis of measurement effected with respect to at least one other of the probes, and effecting a measurement with respect said at least one of the probes with reference to said measurement effected with respect to said at least one other of the probes, wherein the respective measurement conditions are stabilized by a feedback control loop.
-
-
49. A method of effecting local measurements referring to a sample, comprising:
-
providing at least two probes in a positional relation with respect to a sample or a reference surface, adjusting a respective measurement condition for at least one of the probes on the basis of measurements effected with respect to at least one other of the probes, and effecting a measurement with respect said at least one of the probes with reference to said measurements effected with respect to said at least one other of the probes, wherein a distance between an interaction or measurement section of the probes in a height direction associated with said sample or reference surface is adjustable.
-
-
50. A method of effecting local measurements referring to a sample, comprising:
-
providing at least two probes in a positional relation with respect to a sample or a reference surface, adjusting a respective measurement condition for at least one of the probes on the basis of measurements effected with respect to at least one other of the probes, and effecting a measurement with respect said at least one of the probes with reference to said measurements effected with respect to said at least one other of the probes, wherein the said measurements effected with respect to at least one other of the probes are detected by a piezo-electric detection arrangement.
-
-
51. A method of effecting local manipulations referring to a sample, comprising;
-
providing at least two probes in a positional relation with respect to a sample or a reference surface, adjusting a respective manipulation condition for at least one of the probes on the basis of measurements effected with respect to at least one other of the probes according to at least one time constant, and manipulating said sample by means for said at least one of the probes with reference to said measurements effected with respect to said at least one other of the probes.
-
-
52. A method of effecting local manipulations referring to a sample, comprising:
-
providing at least two probes in a positional relation with respect to a sample or a reference surface, adjusting a respective manipulation condition for at least one of the probes on the basis of measurements effected with respect to said at least one of the probes, and obtaining measurements for the resulting manipulation condition for at least one of the other probes, wherein the measurements for said at least one of the probes are a function of the measurements for said at least one of the other probes.
-
-
53. A method of effecting local manipulations referring to a sample, comprising;
-
providing at least two probes in a positional relation with respect to a sample or a reference surface, adjusting a respective manipulation condition for at least one of the probes on the basis of measurements effected with respect to at least one other of the probes, and manipulating said sample by means for said at least one of the probes with reference to said measurements effected with respect to said at least one other of the probes, wherein the respective measurement conditions are stabilized with by a feedback control loop.
-
-
54. A method of effecting local manipulations referring to a sample, comprising;
-
providing at least to probes in a positional relation with respect to a sample or a reference surface, adjusting a respective manipulation condition for at least one of the probes on the basis of measurements effected with respect to at least one other of the probes, and manipulating said sample by means for said at least one of the probes with reference to said measurements effected with respect to said at least one other of the probes, wherein a distance between an interaction or measurement section of the probes in a height direction associated with said sample or reference surface is adjustable.
-
-
55. A method of effecting local manipulations referring to a sample, comprising;
-
providing at least two probes in a positional relation with respect to a sample or a reference surface, adjusting a respective manipulation condition for at least one of the probes on the basis of measurements effected with respect to at least one other of the probes, and manipulating said sample by means for said at least one of the probes with reference to said measurements effected with respect to said at least one other of the probes, wherein the said measurements effected with respect to at least one other of the probes are detected by a piezo-electric detection arrangement.
-
-
56. A method of effecting local measurements referring to a sample, comprising:
-
providing at least two probes in a positional relation with respect to a sample or a reference surface, adjusting a respective measurement condition for at least one of the probes on the basis of measurements effected with respect to at least one other of the probes, and effecting a measurement with respect said at least one of the probes with reference to said measurement effected with respect to said at least one other of the probes wherein thermal position fluctuations of at least one of the probes are detected. - View Dependent Claims (57)
-
-
58. A method of effecting local measurements referring to a sample, comprising:
-
providing a first probe and at least one other probe in a positional relation with respect to a sample or reference surface, adjusting a respective measurement condition for said first probe on the basis of measurements effected with respect to said at least one other probe in the course of scanning said first probe and said at least one other probe in a height direction associated with said sample or reference surface, effecting measurements with respect to said first probe with reference to said at least one other probe in the course of scanning said first probe and said at least one other probe in said height direction, so that local measurement data are obtained comprising interaction data indicating a local interaction with said sample or reference surface sensed by said first probe and associated distance data indicating a distance relation of said first probe with respect to said sample or reference surface, said distance data being obtained or calibrated on the basis of measurements concomitantly effected with respect to said at least one other probe, said local measurement data being interaction-distance-profile data indicating a dependency of a local interaction sensed by said first probe of a distance of said first probe from said sample or reference surface.
-
-
59. A method of effecting local measurements referring to a sample, comprising:
-
providing a first probe and at least one other probe in a positional relation with respect to a sample, scanning in a first scan said first probe over said sample and acquiring topographic data by measuring the topography of said sample with said first probe, scanning in a second scan said at least one other probe over said sample, in the course of said second scan, adjusting a respective measurement condition for said at least one other probe on the basis of measurements effected during said second scan with respect to said first probe and on the basis of said topographic data, and in the course of said second scan, effecting measurements with respect to said at least one other probe with reference to said measurements effected with respect to said first probe.
-
Specification