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Multiple local probe measuring device and method

  • US 6,798,226 B2
  • Filed: 09/24/2002
  • Issued: 09/28/2004
  • Est. Priority Date: 09/20/1999
  • Status: Expired due to Fees
First Claim
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1. A method of effecting local measurements referring to a sample, comprising:

  • providing at least two probes in a positional relation with respect to a sample or a reference surface, adjusting a respective measurement condition for at least one of the probes on the basis of measurements effected with respect to at least one other of the probes, and effecting a measurement with respect said at least one of the probes with reference to said measurements effected with respect to said at least one other of the probes, wherein at least one of the measurement conditions is roughly adjusted on the basis of the measurement of at least one of the probes and is finely adjusted on the basis of the measurement of at least one other of the probes.

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