Micromirror systems with open support structures
First Claim
Patent Images
1. A micromirror device comprising:
- a substrate with electrical components including address circuitry, and an array of micromechanical light modulator elements, each micromechanical light modulator element comprising a mirror portion above said substrate, a plurality of hinge portions below said mirror portion and a plurality of electrode portions, wherein at least one of a selected mirror portion, hinge portion or electrode portion is held above said substrate by a an open support located at an outer edge of the selected portion.
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Abstract
Micromirror devices, especially for use in digital projection are disclosed. Other applications are contemplated as well. The devices employ a superstructure that includes a mirror supported over a hinge set above a substructure. Various improvements to the superstructure over known micromirror devices are provided. The features described are applicable to improve manufacturability, enable further miniaturization of the elements and/or to increase relative light return. Devices can be produced utilizing the various optional features described herein, possibly offering cost savings, lower power consumption, and higher resolution.
61 Citations
16 Claims
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1. A micromirror device comprising:
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a substrate with electrical components including address circuitry, and an array of micromechanical light modulator elements, each micromechanical light modulator element comprising a mirror portion above said substrate, a plurality of hinge portions below said mirror portion and a plurality of electrode portions, wherein at least one of a selected mirror portion, hinge portion or electrode portion is held above said substrate by a an open support located at an outer edge of the selected portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of manufacturing support structures in a micromirror device comprising, a substrate with electrical components including address circuitry, and
an array of micromechanical light modulator elements, each micromechanical light modulator element comprising a mirror portion above said substrate, a plurality of hinge portions below said mirror portion and a plurality of electrode portions, said method comprising: -
producing a precursor structure comprising two columns and an upper surface, removing portions of said columns and said upper surface, leaving only a spanning segment of said precursor upper surface located between said precursor columns, and open supports attached to said spanning segment. - View Dependent Claims (10, 11, 12)
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13. A method of manufacturing electrodes in a micromirror device, comprising, a substrate with electrical components including address circuitry, and an array of micromechanical light modulator elements, each micromechanical light modulator element comprising a mirror portion above said substrate, a plurality of hinge portions below said mirror and a plurality of electrode portions, said method comprising:
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providing a sacrificial layer of mater and on a first surface of said substrate, depositing electrode material over said first surface and a second surface of said sacrificial layer, and removing said sacrificial layer, leaving at least one electrode with an upper portion supported by an open support portion above an electrode lower portion on said substrate. - View Dependent Claims (14, 15, 16)
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Specification