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Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements

  • US 6,798,561 B2
  • Filed: 12/29/2003
  • Issued: 09/28/2004
  • Est. Priority Date: 06/19/1995
  • Status: Expired due to Term
First Claim
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1. A spatial light modulator, comprising:

  • a substrate that is transmissive to visible light;

    a silicon substrate;

    wherein the silicon substrate and the substrate that is transmissive to visible light are bonded together with a spacer therebetween forming a gap between the substrates; and

    a plurality of deflectable elements encapsulated within the gap.

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