Switching device, particularly for optical switching

• US 6,798,935 B2
• Filed: 03/26/2002
• Issued: 09/28/2004
• Est. Priority Date: 02/25/2000
• Status: Expired due to Term

• Current Assignee: Safran Colibrys SA
• Original Assignee: Colibrys Incorporated (Safran Sensing Technologies Switzerland SA)
• Inventors: Van Der Wiel, Appolonius, Gonseth, Stephan, Debergh, Patrick, Perregaux, Grégoire, Bourgeois, Claude, Rudolf, Felix
• Primary Examiner(s): Patel, Nimeshkumar D.
• Assistant Examiner(s): Krishnan, Sumati
• Application Number:
  US10/048,126
• Publication Number:
  US 20020118911A1
• Time in Patent Office: 917 Days
• Field of Search: 385/16-23
• US Class Current: 385/16
• CPC Class Codes: G02B 6/353 the optical element being a shutter, baffle, beam dump or opaque element absorbers on light guide termination G02B6/243
• CPC Class Codes: G02B 6/3552 1x1 switch, e.g. on/off switch
• CPC Class Codes: G02B 6/3566 involving bending a beam, e.g. with cantilever
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C

Abstract

This switching device comprises at least one cell made up of a moving structure consisting in a flexible cantilever beam (14) and an integral screen (16) attached to said beam, being able to move between two end positions (A, B) and of actuating electrodes (20) for subjecting said structure to forces of attraction to control its movements. The electrodes (20) are located on each side of the beam (14) in such a way as to follow its exact shape when it is in one of its two end positions. A regular movement of the moving structure and a reliable operating of the switching device are thus obtained This invention may be used in optical switching applications.

Claims

1. A switching device comprising at least one cell made up of a moving structure capable of moving between two end positions and fixed actuating electrodes for subjecting said moving structure to forces of attraction to control its movement, said moving structure being movable relative to said electrodes and electrodes being located on each side of the moving structure in such a way as to follow its exact shape when it is in one of its two end positions, said moving structure comprising a flexible cantilever beam and an integral screen attached to said beam, wherein said electrodes are located only on each side of said beam.

2. The switching device of claim 1, further comprising, associated with each electrode, at least one stopper serving as a stop for said beam and for the purpose of preventing said beam coming into contact with said electrode.

3. The switching device of claim 2, said stopper being located at the free end of said cantilever beam, beyond said screen.

4. The switching device of claim 2, further comprising a plurality of stoppers distributed along the length of said electrodes.

5. The switching device of claim 2, wherein the side walls of the moving structure, stoppers and electrodes are coated with a diamond layer.

6. The switching device of claim 5, characterized in that said diamond layer is conductive.

7. The switching device of claim 1, said switching device being made on a substrate.

8. The switching device of claim 7, said substrate being made of transparent material.

9. The switching device of claim 7, said substrate having a transverse aperture positioned in such a way as to be closed by the screen when the system is in one of its end positions.

10. The switching device of claim 9, said aperture, on the opposite side of the screen, having a portion of a greater diameter than the portion located on the side of the screen.

11. The switching device of claim 10, said portion of greater diameter being conical.

12. The switching device of claim 1, said beam presenting a ‘

T’

shaped section.

13. The switching device of claim 1, each electrode being connected to a conductor linked to a control circuit, the electrode connection with said conductor comprising a fuse.