Tuning fork vibrator, vibrating gyroscope using the same, electronic apparatus using the same, and manufacturing method of the same
First Claim
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1. A tuning fork vibrator comprising:
- a plate-shaped vibration unit having a first principal surface and a second principal surface;
a base provided at one end of the second principal surface of the vibration unit in a longitudinal direction thereof;
wherein at least one slit for dividing the vibration unit into at least two legs along the longitudinal direction symmetrically in a width direction of the vibration unit is provided in the vibration unit; and
the at least one slit is arranged to include a portion of the base in proximity to the vibration unit.
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Abstract
A tuning fork vibrator includes a long plate-shaped vibration unit having a first principal surface and a second principal surface, a base disposed at one end of the second principal surface of the vibration unit in the longitudinal direction, and a slit for dividing the vibration unit into two legs defining a tuning fork along the longitudinal direction symmetrically in the width direction of the vibration unit. The slit is formed so as to include a portion of the base in the vicinity to the vibration unit.
16 Citations
12 Claims
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1. A tuning fork vibrator comprising:
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a plate-shaped vibration unit having a first principal surface and a second principal surface;
a base provided at one end of the second principal surface of the vibration unit in a longitudinal direction thereof;
whereinat least one slit for dividing the vibration unit into at least two legs along the longitudinal direction symmetrically in a width direction of the vibration unit is provided in the vibration unit; and
the at least one slit is arranged to include a portion of the base in proximity to the vibration unit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A vibrating gyroscope comprising:
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a tuning fork vibrator including;
a plate-shaped vibration unit having a first principal surface and a second principal surface;
a base provided at one end of the second principal surface of the vibration unit in a longitudinal direction thereof;
whereinat least one slit for dividing the vibration unit into at least two legs along the longitudinal direction symmetrically in a width direction of the vibration unit is provided in the vibration unit; and
the at least one slit is arranged to include a portion of the base in proximity to the vibration unit. - View Dependent Claims (11, 12)
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Specification