Integrated monolithic microfabricated electrospray and liquid chromatography system and method

• US 6,800,202 B2
• Filed: 12/21/2000
• Issued: 10/05/2004
• Est. Priority Date: 09/17/1998
• Status: Expired due to Term

• Current Assignee: Rheonix, Inc.
• Original Assignee: Advion BioSciences Incorporated, Kionix Incorporated (ROHM Co., Ltd.)
• Inventors: Moon, James E., Schultz, Gary A., Davis, Timothy J., Corso, Thomas N., Galvin, Gregory J., Lowes, Stephen
• Primary Examiner(s): Therkorn, Ernest G.
• Application Number:
  US09/745,629
• Publication Number:
  US 20010001455A1
• Time in Patent Office: 1,384 Days
• Field of Search: 250/288, 250/288.A, 210/656, 210/748, 210/198.2, 210/243, 204/600, 422/70, 436/161
• US Class Current: 210/656
• CPC Class Codes: G01N 30/6095 Micromachined or nanomachined, e.g. micro- or nanosize
• CPC Class Codes: G01N 30/7266 by electric field, e.g. electrospray
• CPC Class Codes: H01J 49/0018 Microminiaturised spectrometers, e.g. chip-integrated devices, Micro-Electro-Mechanical Systems [MEMS]
• CPC Class Codes: H01J 49/167 Capillaries and nozzles specially adapted therefor; electrostatic spraying per se B05B5/00
• CPC Class Codes: Y10T 29/49002 Electrical device making
• CPC Class Codes: Y10T 436/25375 Liberation or purification of sample or separation of material from a sample [e.g., filtering, centrifuging, etc.]
• CPC Class Codes: Y10T 436/255 including use of a solid sorbent, semipermeable membrane, or liquid extraction

Abstract

An electrospray device, a liquid chromatography device and an electrosprayliquid chromatography system are disclosed. The electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate an electrospray; and, optionally, additional electrode(s) to further modify the electrospray. The liquid chromatography device comprises a separation substrate defining an introduction channel between an entrance orifice and a reservoir and a separation channel between the reservoir and an exit orifice, the separation channel being populated with separation posts perpendicular to the fluid flow; a cover substrate bonded to the separation substrate to enclose the reservoir and the separation channel adjacent the cover substrate; and, optionally, electrode(s) for application of a electric potential to the fluid. The exit orifice of the liquid chromatography device may be homogeneously interfaced with the entrance orifice of the electrospray device to form an integrated single system. An array of multiple systems may be fabricated in a single monolithic chip for rapid sequential fluid processing and generation of electrospray for subsequent analysis, such as by positioning the exit orifices of the electrospray devices near the sampling orifice of a mass spectrometer.

Claims

1. A method of chemical analysis utilizing an integrated chemical analysis system, comprising:

forming a microfabricated device, formed at least in part by reactive-ion etching, defining a liquid chromatography system and an electrospray device, wherein said microfabricated device is configured to receive a fluid for analysis, and wherein a major surface of said microfabricated device is configured to dispense a fluid by electrospraying it;

introducing a fluid for analysis into said liquid chromatography system of said microfabricated device;

analyzing said introduced fluid in said liquid chromatography system; and

after the step of analyzing said fluid, electrospraying said analyzed fluid outside said microfabricated device.

2. The method of claim 1, wherein said step of electrospraying includes electrospraying said fluid into a sampling orifice of a mass spectrometer.

3. The method of claim 1, further comprising analyzing said fluid in said mass spectrometer.