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Method and device for plasma coating surfaces

  • US 6,800,336 B1
  • Filed: 04/29/2002
  • Issued: 10/05/2004
  • Est. Priority Date: 10/30/1999
  • Status: Expired due to Term
First Claim
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1. A method for coating surfaces, comprising the steps of:

  • generating a plasma jet by passing a working gas through an excitation zone and by applying a high frequency AC voltage to electrodes positioned in the excitation zone to produce an arc discharge, supplying a precursor material separately from the working gas to the plasma jet to cause the precursor material to react with the help of plasma in the plasma jet, depositing a reaction product from said reaction on a surface, and providing that the reaction as well as the deposition takes place at atmospheric pressure.

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