Tungsten carbide coating and method for producing the same
First Claim
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1. Material for wear, erosion and corrosion resistant coatings, consisting of tungsten carbide alloyed with fluorine in amounts ranging from 0.0005 to 0.5 wt %.
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Abstract
New tungsten carbides alloyed with fluorine in amounts up to 0.5 wt % and possibly with fluorocarbon compositions are described. It is possible to produce them by means of a new process of chemical vapor deposition, in which tungsten hexafluoride, hydrogen and a carbon-containing gas are used. A specific feature of the new process is the preliminary thermal activation of the carbon-containing gas. The tungsten carbide coatings are deposited on construction materials and items made from them. They possess enhanced resistance to wear, corrosion and chemicals.
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Citations
121 Claims
- 1. Material for wear, erosion and corrosion resistant coatings, consisting of tungsten carbide alloyed with fluorine in amounts ranging from 0.0005 to 0.5 wt %.
- 14. Material for wear, erosion and corrosion resistant coatings comprising a mixture of at least two tungsten carbides alloyed with fluorine in amounts ranging from 0.0005 to 0.5 wt % and possibly with fluorocarbon compositions with carbon content up to 15 wt % and fluorine content up to 0.5 wt %.
- 16. Process for producing tungsten carbides by chemical vapour deposition on a heated substrate using a mixture of gases including tungsten hexafluoride, hydrogen, a carbon-containing gas and, optionally, an inert gas, characterized in that the carbon-containing gas is thermally activated beforehand by heating to temperature 500-850°
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34. Process for the deposition of coatings consisting of an internal layer of tungsten and an external layer containing tungsten subcarbide W12C on substrates, preferably on construction materials and on items made from them, characterised in that the said process includes the following stages:
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(a) placing the substrate in a chemical vapour deposition reactor;
(b) evacuating the reactor;
(c) heating the said substrate;
(d) supplying tungsten hexafluoride and hydrogen to the reactor;
(e) retaining the substrate in the said gaseous medium for the time interval necessary for the formation of the tungsten layer on the substrate;
(f) in addition to the said tungsten hexafluoride and hydrogen, supplying a previously thermally activated carbon-containing gas to the reactor;
(g) retaining the substrate in the gaseous medium formed at stage (f) for the time necessary for the formation of the outer layer containing tungsten carbides and mixtures of them with each other, with tungsten or with free carbon. - View Dependent Claims (35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53)
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54. Material comprising:
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a substrate made from construction material;
a coating deposited on the said substrate, consisting of an internal tungsten layer and an external layer containing tungsten carbide alloyed with fluorine in amounts ranging from 0.0005 to 0.5 wt % and possibly with fluorocarbon compositions with carbon content up to 15 wt % and fluorine content up to 0.5 wt %. - View Dependent Claims (55, 56, 57, 58, 59, 60, 61, 62)
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63. Material comprising:
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a substrate made from construction material;
and a coating deposited on the said substrate, consisting of an internal tungsten layer and an external layer containing a mixture of at least two tungsten carbides alloyed with fluorine in amounts ranging from 0.0005 to 0.5 wt % and possibly with fluorocarbon compositions with carbon content up to 15 wt % and fluorine content up to 0.5 wt %. - View Dependent Claims (64, 65, 66, 67, 68)
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69. Process for the deposition of multilaminar coatings on substrates, preferably on construction materials and items made from them, consisting of alternating layers of tungsten and layers containing tungsten carbide or mixtures of tungsten carbides with each other, with tungsten or with free carbon, said process to include the following stages:
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(a) placing the substrate in a chemical vapour deposition reactor;
(b) evacuating the reactor;
(c) heating the said substrate;
(d) supplying tungsten hexafluoride and hydrogen to the reactor;
(e) retaining the substrate in the said gaseous medium for the time interval necessary for the formation of the tungsten layer on the substrate;
(f) in addition to the said tungsten hexafluoride and hydrogen, supplying a previously thermally activated carbon-containing gas to the reactor;
(g) retaining the substrate in the gaseous medium formed at stage (f) for the time necessary for the formation of the outer layer containing tungsten carbide or mixtures of tungsten carbides with each other, with tungsten and with free carbon;
stages (d) and (g) are repeated several times in order to form alternating layers of tungsten and layers containing tungsten carbides.- View Dependent Claims (70, 71, 72, 73, 74)
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- 75. Construction material comprising a substrate and a multilaminar coating consisting of alternating layers of tungsten and layers containing tungsten carbide alloyed with fluorine in amounts ranging from 0.0005 to 0.5 wt % and possibly with fluorocarbon compositions with carbon content up to 15 wt % and fluorine content up to 0.5 wt %.
- 83. Construction material comprising a substrate and a multilaminar coating consisting of alternating layers of tungsten and layers containing a mixture of at least two tungsten carbides alloyed with fluorine in amounts ranging from 0.0005 to 0.5 wt % and possibly with fluorocarbon compositions with carbon content up to 15 wt % and fluoride content up to 0.5 wt %.
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89. Material for wear, erosion and corrosion resistant coatings, consisting of tungsten carbide alloyed with fluorine in amounts ranging from 0.0005 to 0.5 wt %, wherein the material is deposited on a heated substrate by way of chemical vapour deposition in a chemical vapour deposition reactor using a mixture of gases including tungsten hexafluoride, hydrogen, a carbon-containing gas and, optionally, an inert gas, and wherein the carbon-containing gas is heated to a temperature of 500 to 850°
- C. prior to being supplied to the reactor.
- View Dependent Claims (90, 91, 92, 93, 94)
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95. Material for wear, erosion and corrosion resistant coatings comprising a mixture of at least two tungsten carbides alloyed with fluorine in amounts ranging from 0.0005 to 0.5 wt % and optionally with fluorocarbon compositions with carbon content up to 15 wt % and fluorine content up to 0.5 wt %, wherein the material is deposited on a heated substrate by way of chemical vapour deposition in a chemical vapour deposition reactor using a mixture of gases including tungsten hexafluoride, hydrogen, a carbon-containing gas and, optionally, an inert gas, and wherein the carbon-containing gas is heated to a temperature of 500 to 850°
- C. prior to being supplied to the reactor.
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101. Process for producing tungsten carbides in a chemical vapour deposition reactor by chemical vapour deposition on a heated substrate using a mixture of gases including tungsten hexafluoride, hydrogen, a carbon-containing gas and, optionally, an inert gas, wherein the carbon-containing gas is thermally activated before being supplied to the reactor by heating to a temperature of 500-850°
- C., and wherein fluorine is alloyed with the tungsten carbides in amounts ranging from 0.0005 to 0.5 wt %.
- View Dependent Claims (102, 103, 104, 105, 106, 107, 108, 109, 110, 111, 112, 113, 114, 115, 116, 117, 118)
- 119. Material for wear, erosion and corrosion resistant coatings, the material including tungsten carbide alloyed with fluorine in amounts ranging from 0.0005 to 0.5 wt %, and having a microhardness of at least 3100 kg/mm2.
Specification