Method and system for wafer and device-level testing of an integrated circuit

• US 6,801,869 B2
• Filed: 10/19/2001
• Issued: 10/05/2004
• Est. Priority Date: 02/22/2000
• Status: Expired due to Fees

• Current Assignee: Don Mccord
• Original Assignee: Don Mccord
• Inventors: McCord, Don
• Primary Examiner(s): Assouad, Patrick J.
• Application Number:
  US09/980,509
• Publication Number:
  US 20020173926A1
• Time in Patent Office: 1,082 Days
• Field of Search: 702/112, 702/118, 702/120, 702/124, 714/29, 714/718, 714/738, 714/739, 365/200, 365/201, 365/219, 324/765, 324/764, 324/761, 324/605
• US Class Current: 702/117
• CPC Class Codes: G01R 31/30 Marginal testing, e.g. by varying supply voltage testing computers during standby operation or idle time G06F11/22
• CPC Class Codes: G01R 31/3016 Delay or race condition test, e.g. race hazard test
• CPC Class Codes: G01R 31/318505 Test of Modular systems, e.g. Wafers, MCM's
• CPC Class Codes: G01R 31/318511 Wafer Test
• CPC Class Codes: G01R 31/31905 Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture
• CPC Class Codes: G01R 31/31924 Voltage or current aspects, e.g. driver, receiver
• CPC Class Codes: G01R 31/31926 Routing signals to or from the device under test [DUT], e.g. switch matrix, pin multiplexing
• CPC Class Codes: G11C 29/006 at wafer scale level, i.e. wafer scale integration [WSI]
• CPC Class Codes: G11C 29/48 Arrangements in static stores specially adapted for testing by means external to the store, e.g. using direct memory access [DMA] or using auxiliary access paths
• CPC Class Codes: G11C 29/56 External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
• CPC Class Codes: G11C 7/1066 Output synchronization

Abstract

A tester comprises test logic and a connector for at least one device under test. The connector, which may comprise a wafer probe for dice on a wafer or a test fixture for packaged integrated circuit devices, has connections for the device under test that present an impedance selected to emulate the characteristic impedance of an end-use environment of the device under test. For example, in an embodiment in which the device under test comprises a logic device using Rambus Signaling Levels (RSL) to communicate to other devices and the end-use environment is connection to a Rambus channel, the characteristic impedance is between approximately 20 and 60 ohms. If, on the other hand, the end-use environment is connection to a Rambus memory module, then the characteristic impedance is approximately 28 ohms. Alternatively, if the end-use environment is connection to a DDR memory module, then the characteristic impedance is approximately 60 ohms. Thus, the tester of the present invention can accurately simulate operational behavior in an end-use environment of the device under test. Because this accurate simulation is available even for dice on a wafer, the needless expense associated with packaging defective dies and assembling defective dies into boards can be avoided. The test logic, which is coupled to the connector for communication with the deviceunder test, transfers test vectors and test data to the device under test. The test data and commands are utilized to perform multiples types of tests, including tests of the core logic and interface logic of the device under test. In this manner, the need for multiple types of testers is reduced or eliminated.

Claims

1. A tester for testing dice on a wafer, said tester comprising:

a wafer probe card having connections for at least one die on a wafer, wherein the connections of the wafer probe card present an impedance selected to emulate the characteristic impedance of an end-use environment for a packaged device containing the at least one die; and

tester logic, coupled to the wafer probe card, that, responsive to receipt of a first command from the at least one die signifying a read access, supplies requested data to the at least one die via the wafer probe card, and responsive to receipt of a second command from the at least one die signifying a write access, stores associated data received from the at least one die in a memory.

2. The tester of claim 1, wherein the at least one die is a logic device using Rambus Signaling Levels (RSL) to communicate to other devices, the end-use environment is a Rambus channel, and the characteristic impedance is between 20 and 60 ohms.

3. The tester of claim 1, wherein the at least one die is a logic device using Rambus Signaling Levels (RSL) to communicate to other devices, the end-use environment is a Rambus memory module and the characteristic impedance is approximately 28 ohms.

4. The tester of claim 1, wherein the connections comprise microsprings, on at least one of the tester intersurface and the at least one die.

5. The tester of claim 1, said wafer probe card including a variable impedance network having a dynamically alterable impedance selected by the tester logic.

6. The tester of claim 1, wherein said wafer probe card includes at least one dummy packaged device to simulate operating characteristics of the end-use environment.

7. The tester of claim 1, wherein the tester logic includes a Rambus ASIC cell (RAC) that interfaces with the wafer probe card.

8. The tester of claim 1, wherein the tester logic further comprises:

a timing generator that generates at least one timing signal received by the tester logic and at least one corresponding timing signal received by the at least one die on the wafer, wherein the at least one timing signal coordinates data transfer between the tester logic and the at least one die; and

one or more delay elements that selectively alter the relative phases of the at lean one timing signal received by the at least one die and the at least one timing signal received by the tester logic in order to test timing sensitivity of the at least one die.

9. The tester of claim 8, wherein the one or mare delay elements delay die at least one timing signal sent to the at least one die relative to the corresponding at least one timing signal sent to the tester logic.

10. The tester of claim 9, wherein the at least one die comprises a logic device using Rambus Signaling Levels (RSL) to communicate to other devices, and wherein the at least one timing signal received by the RSL logic die comprises a clock-to-master positive polarity (CTM) clock signal and a clock-to-master negative polarity (CTMN) clock signal.

11. The tester of claim 10, wherein the RSL logic die outputs to the tester logic data signals and row and column signals while the one or more delay elements delay the clock-from-master positive polarity clock signal (CFM) and the clock-from-master negative polarity (CFMN) clack signal to the tester logic in order to test sensitivity of the RSL logic die to the clock-to-data timing parameter for reads by the RSL logic die.

12. The tester of claim 8, wherein the one or more delay elements delay the at least one timing signal sent to the tester logic relative to the corresponding at least one timing signal sent to the at least one die.

13. The tester of claim 12, wherein the at least one die comprises a RSL logic die, and wherein the at least one timing signal received from the RSL logic die comprises a clock-from-master positive polarity (CFM) clock signal and a clock-from-master negative polarity (CFMN) clock signal.

14. The tester of claim 13, wherein the RSL logic receives data signals from the tester logic while the one or more delay elements delay the dock-to-master (CTM) clock signal and the clock-to-master negative (CTMN) clock signal to the tester logic in order to test sensitivity of a setup and hold output timing parameter for writes by the RSL logic die.

15. The tester of claim 8, wherein the one or more delay elements shift the phase of the at least one timing signal received by the at least one die in small increments relative to the at least one timing signal received by the tester logic to vary the timing between reads by the at least one die and writes by the at least one die so test for worst case failures.

16. The tester of claim 15, wherein:

the at least one die comprises a RSL logic die;

the at least one timing signal received by the RSL logic die comprises a clock-to-master positive polarity (CTM) clock signal and a clock-to-master negative polarity (CTMN) clock signal; and

the at least one timing signal received by the tester logic comprises a clock-from-master positive polarity (CFM) clock signal and a clock-from-master negative polarity (CFMN) clock signal.

52. The tester of claim 1, wherein the at least one die comprises a logic device using a double data rate (DDR) synchronous dynamic memory bus to communicate to other devices.

53. The tester of claim 52, wherein the end-use environment is a DDR memory module and the characteristic impedance in approximately 60 ohms.

54. The tester of claim 1, wherein the tester logic includes one or more double data rate (DDR) synchronous dynamic memory devices that interface with the wafer probe card.

55. The tester of claim 8, wherein the at least one die comprises a DDR logic die using double data rate (DDR) synchronous dynamic memory bus to communicate to other devices, and wherein the at least one timing signal received by the DDR logic die comprises a data strobe (DQS) timing signal and the at least one corresponding timing signal received by the tester logic comprises a data strobe (DQS) timing signal.

56. The tester of claim 55, and further comprising one or more delay elements that alter the relative timing of the DQS timing signal sear to the tester logic and the DQS timing signal sent to the DDR logic die.

57. The tester of claim 56, wherein the DDR logic die outputs, to the tester logic, data signals while the one as more delay elements delay the data strobe (DQS) timing signal to the tester logic in order to test sensitivity of the DDR logic die to the clock-to-data timing parameter for reads by the DDR logic die.

58. The tester of claim 56, wherein the DDR logic receives data signals from the tester logic while she one or mare delay elements delay data strobe (DQS) timing signal to the tester logic in order to test sensitivity of a setup and hold output timing parameter for writes by the DDR logic die.

59. The tester of claim 58, wherein the one or more delay elements shift the phase of the DQS timing signal received by the DDR logic die in small increments relative to the DQS timing signal received by the tester logic to vary the timing between reads by the DDR logic die and writes by the DDR logic die to test for worst case failures.

60. The tester of claim 1, wherein the tester logic includes at least one double data rate (DDR) synchronous dynamic memory module that interfaces with the wafer probe card.

17. A tester for testing packaged integrated circuit devices, said tester comprising:

a test fixture having connections for at least one packaged integrated circuit device, wherein the connections of the test fixture present an impedance selected to emulate the characteristic impedance of an end-use environment for the at least one packaged integrated circuit device; and

tester logic, coupled to the test fixture, that receives test data transfers initiated by the at least one packaged device vie die test fixture.

18. The tester of claim 17, wherein the at least one packaged integrated circuit device is a logic device using a Rambus Signaling Levels (RSL) to communicate to other devices, the end-use environment is a Rambus channel, and the characteristic impedance is between 20 and 60 ohms.

19. The tester of claim 17, wherein the at least one packaged integrated circuit device is a RSL logic device, the end-use environment is a Rambus memory module, and the characteristic impedance is approximately 28 ohms.

20. The tester of claim 17, wherein the connections comprise micorsprings.

21. The tester of claim 17, said test fixture including a variable impedance network having a dynamically alterable impedance selected by the tester logic.

22. The tester of claim 17, wherein said test fixture includes at least one dummy packaged integrated circuit device to simulate operating characteristics of the end-use environment.

23. The tester of claim 17, wherein the at least one packaged integrated circuit device comprises a packaged RSL logic device, and wherein the tester logic includes a Rambus ASIC cell (RAC) that interfaces with the seat fixture.

24. The tester of claim 17, wherein the tester logic further comprises:

a timing generator that generates at least one timing signal received by the tester logic and at least one corresponding timing signal reserved by the at least one packaged integrated circuit device, wherein the at least one timing signal coordinates data transfer between the tester logic and the at least one packaged integrated circuit device; and

one or more delay elements that selectively alter the relative phases of the at least one timing signal received by the at least one packaged integrated circuit device and the at least one timing signal received by the tester logic in order to rest timing sensitivity of the at least one packaged integrated circuit device.

25. The tester of claim 24, wherein the one or more delay elements delay the at least one timing signal sent to the at leant one packaged integrated circuit device relative to the corresponding at least one clock signal sent to the tester logic.

26. The tester of claim 25, wherein the at least one packaged integrated circuit device comprises a packaged RSL logic device, and wherein the at least one timing signal received by the packaged RSL logic device comprises a clock-to-master positive polarity (CTM) clock signal and a clock-to-master negative polarity (CTMN) clock signal.

27. The tester of claim 26, wherein the packaged RSL logic device outputs to the tester logic data signals and row and column signals while the one or more delay elements delay the clock-to-master positive polarity (CTM) clock signal and the clock-to-master negative polarity (CTMN) clock signal to the packaged RSL logic device in order to test sensitivity of the packaged RSL logic device to a clock-to-data output timing parameter for reads by the packaged RSL logic device.

28. The tester of claim 24, wherein the one or more delay elements delay the at least one timing signal sent to the tester logic relative to the corresponding at least one timing signal sent to the at least one packaged integrated circuit device.

29. The tester of claim 28, wherein the at least one packaged integrated circuit device comprises a packaged RSL logic device, and wherein the at least one timing signal received by the tester logic comprises a clock-from-master positive polarity (CFM) clock signal and a clock-from-master negative polarity (CFMN) clock signal.

30. The tester of claim 23, wherein the packaged RSL logic device receives data signals from the tester logic while the one or more delay elements delay the clock-from master (CFM) clock signal and the clock-from-master negative (CFMN) clock signal to the tester logic in order to test sensitivity of setup and hold timing parameters for writes by, the packaged RSL logic device.

31. The tester of claim 25, wherein the one or more delay elements shift the phase of the at least one timing signal received by the at least one packaged integrated circuit device in small increments relative to the at least one timing signal received by the tester logic to vary the timing between reads by the at least one packaged integrated circuit device and writes by the at least one packaged integrated circuit device to test for worst case failures.

32. The tester of claim 31, wherein:

the at least one packaged integrated circuit device comprises a packaged RSL logic device;

the at least one timing signal received by the packaged RSL logic device comprises a clock-to-master positive polarity (CTM) clock signal and a clock-to-master negative polarity (CTMN) clock signal; and

the at least one timing signal received by the tester logic comprises a clock-from-master positive polarity (CFM) clock signal and a clock-from-master negative polarity (CFM-N) clock signal.

48. The tester of claim 18, wherein the at least one packaged RSL logic integrated circuit device is attached to a circuit board and the test fixture includes probes for contacting traces of said circuit board to permit the tester logic to communicate with the at least one packaged RSL integrated circuit device using Rambus Signaling Lewis (RSL) over a Rambus channel.

49. The tester of claim 18, wherein the at least one packaged RSL logic integrated circuit device is attached to a circuit board and the test fixture includes a connector fitting into a socket on said circuit board to permit the tester logic to communicate with the at least one packaged RSL logic integrated circuit device using Rambus Signaling Levels (RSL) over a Rambus channel.

50. The tester of claim 19, wherein the at least one packaged RSL logic integrated circuit device is attached to a circuit board and the test fixture includes probes for contacting traces of said circuit board to permit the tester logic to communicate with the at least one packaged RSL logic integrated circuit device using Rambus Signaling Levels (RSL) while the tester logic is emulating a Rambus memory module.

51. The tester of claim 19, wherein the at least one packaged RSL logic integrated circuit device is attached to a circuit board and the test fixture includes a connector fitting into a socket on said circuit board to permit the tester logic to communicate with the at least one packaged RSL logic integrated circuit device using Rambus Signaling Levels (RSL) while the tester logic is emulating Rambus memory module.

61. The tester of claim 17, wherein the at least one packaged integrated circuit device comprises a DDR logic device that uses a double data rate (DDR) synchronous dynamic memory bus to communicate to other devices, the end-use environment is a DDR memory module;

and

the characteristic impedance is approximately 60 ohms.

62. The tester of claim 17, wherein the at least one packaged integrated circuit device comprises a packaged DDR logic device, and wherein the tester logic includes one or more double data rate (DDR) synchronous dynamic memory devices that interface with the test fixture.

63. The tester of claim 24, wherein the at least one packaged integrated circuit device comprises a packaged DDR logic device, and wherein the at least one timing signal received by the packaged DDR logic device comprises a data strobe (DDS) timing signal and wherein the at least one corresponding timing signal received by the tester logic comprises a data strobe (DQS) timing signal.

64. The tester of claim 63, wherein the packaged DDR logic device outputs to the tester logic data signals while the one or more delay elements delay the data strobe (DQS) timing signal to the packaged DDR logic device in order to test sensitivity of the packaged DDR logic device torn clock-to-data output timing parameter for reads by the packaged RSL logic device.

65. The tester of claim 63, wherein the packaged DDR logic device receives data signals limit the tester logic while the one or more delay elements delay the data strobe (DQS) timing signal to the tester logic to test setup and bold timing parameters for writes by the packaged DDR logic device.

66. The tester of claim 63, wherein the one or more delay elements shift the phase of the DQS timing signal received by the at least one packaged integrated circuit device in small increments relative to the DQS timing signal received by the tester logic to vary the timing between reads by the at least one packaged integrated circuit device and writes by the at least one packaged integrated circuit device to test for worst case failures.

72. The tester of claim 61, wherein the at least one packaged DDR logic integrated circuit device is attached to a circuit board and the test fixture includes probes for contacting traces of said circuit board to permit the tester logic to communicate with the at least one packaged DDR logic integrated circuit device using a DDR synchronous dynamic memory bus.

73. The tester of claim 61, wherein the as least one packaged DDR logic integrated circuit device is attached to a circuit board and the test fixture includes probes for contacting traces of said circuit board to permit the tester logic to communicate with the at least one packaged logic integrated circuit device using a double data rate synchronous dynamic (DDR) memory bus while the tester logic is emulating a DDR memory module.

74. The tester of claim 61, wherein the at least one packaged DDR logic integrated circuit device is attached so a circuit board and the test fixture includes a connector fitting into a socket on said circuit board to permit the tester logic to communicate with the at least one packaged logic integrated circuit device using double data rate (DDR) synchronous dynamic memory bus while the tester logic is emulating DDR memory module.

33. A logic tester, comprising:

a connector having connections for a logic device under test (DUT) that is one of a packaged integrated circuit device and a logic die on a wafer, wherein the connections of the connector present an impedance selected to emulate the characteristic impedance of an end-use environment for the logic DUT; and

tester logic, coupled to the apparatus, that communicates test data with the logic DUT, wherein said tester logic, responsive to receipt of a first command from the logic DUT signifying a read access, supplies requested data to the logic DUT via the wafer probe card, and responsive to receipt of a second command from the logic DUT signifying a write access, stores associated data received from the logic DUT in a memory.

34. The logic tester of claim 33, wherein the logic DUT is one of a packaged logic device and a RSL logic die using Rambus Signaling Levels (RSL) to communicate to other devices, and wherein the characteristic impedance is equivalent to that of a Rambus channel or a Rambus memory module.

35. A method of testing an integrated circuit device, said method comprising:

connecting a device under test that is one of a packaged integrated circuit device and logic die on a wafer to connections of a connector, wherein the connections present an impedance selected to emulate the characteristic impedance of an end-use environment for a packaged integrated circuit device including the device under test; and

coupling test logic in the connector; and

communicating test data transfers initiated by the device under test to the test logic via the connector to test the device under test, wherein said communicating includes;

in response to receiving a first command from the device under test signifying a read access, the test logic supplying requested test data to the device under test via the connector; and

In response to receiving a second command from the device under test signifying a write success, storing associated test data received from the at least one die in a memory.

36. The method of claim 35, wherein the end-use environment is a Rambus channel and the characteristics impedance is between 20 and 60 ohms.

37. The method of claim 35, wherein the end-use environment is a Rambus memory module and the characteristic impedance is approximately 28 ohms.

38. The method of claim 35, wherein said connector includes a variable impedance network, and wherein communicating test data between the device under test and the test logic comprises communicating test data with said variable impedance network set to multiple different impedances.

39. The method of claim 35, and further comprising interfacing the connector to the tester logic with a Rambus ASIC cell (RAC).

40. The method of claim 35, and further comprising:

generating at least one first timing signal received by the tester logic and at least one second timing signal received by the device under test, wherein the first and second timing signals coordinate data transfer between the tester logic and the device under test; and

selectively altering the phase of one of the first timing signal and the second timing signal to test timing sensitivity of the device under test.

41. The method of claim 40, wherein selectively altering comprises delaying the second timing signal sent to the device under test.

42. The method of claim 40, wherein the device under test uses Rambus Level (RSL) to communicate to other devices, and wherein generating at least one second timing signal comprises generating a clock-to-master (CTM) clock signal and a clock-to-master negative (CTMN) clock signal.

43. The method of claim 40, wherein the device under test receives data signals from the tester logic while the clock-to-master (CTM) clock signal and the clock-to-master negative (CTMN) clock signal are delayed to test sensitivity of a clock-to-data output timing parameter for reads.

44. The method of claim 40, wherein selectively altering comprises delaying the first timing signal sent to the tester logic.

45. The method of claim 43, wherein the at least one die uses Rambus Signaling Levels (RSL) to communicate to other devices, and wherein the first timing signal comprises a clock-from-master (CFM) clock signal and a clock-from-master negative polarity (CFMN) clock signal.

46. The method of claim 44, wherein the device under test outputs, to the tester logic, data signals and row and column signals while the clock-from-master (CFM) clock signal and the clock-from-master negative (CFMN) clock signal are delayed in order to test sensitivity of the device under test to the setup and hold timing parameters for writes.

47. The method of claim 40, wherein selectively altering comprises shifting the phase of the at least one second timing signal received by the device under test in increments relative to the at least one first timing signal received by the tester logic to vary the timing between reads from the device under test and writes to the device under test to test for worst case failures.

67. The method of claim 35, wherein the at least one die comprises a DDR logic device that employs a double data rate (DDR) synchronous dynamic memory bus to communicate to other devices, the end-use environment is a DDR memory module, and the characteristic impedance is approximately 60 ohms.

68. The method of claim 35, and further comprising interfacing the connector to the tester logic with one or more data rate (DDR) synchronous dynamic memory devices.

69. The method of claim 40, wherein the device under test uses a double data rate (DDR) synchronous dynamic memory bus to communicate to other devices, and wherein generating at least one first and at least one second timing signal comprises generating at least a first data strobe (DQS) timing signal and at least a second data strobe (DQS) timing signal.

70. The method of claim 69, wherein the device under test receives data signals from the tester logic while the second data strobe (DQS) timing signal to the device under test is delayed to test sensitivity of a clock-to-data output timing parameter for reads.

71. The method of claim 69, wherein the device under test outputs, to the tester logic, data signals and row and column signals while the first data strobe (DQS) timing signal to the tester logic is delayed in order to test sensitivity of the device under test to the setup and hold timing parameters for writes.