Polyvinyl acetal composition roller brush with abrasive outer surface
First Claim
1. A polishing device comprising a body made of porous polyvinyl acetal material having a uniform pore size throughout the body with over 80% of the pores being below 40 microns in diameter, said body being coated with a slurry comprising a hydrophillic urethane based adhesive and mixed abrasive particles of polishing materials which are cured on said body to form a thin abrasive skin which is absorbed into the body pores and follows the contour of the pores and an outer surface of said body.
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Accused Products
Abstract
A semiconductor polishing device having a substantially cylindrical roller body made of polyvinyl acetal with a uniform material porosity having a mean flow pore pressure ranging from about 0.30 PSI to about 0.35 PSI with 80% of its pores ranging from 7 to 40 microns in size coated with a low viscosity adhesive composition of an appropriately formulated aliphatic or aromatic difunctional polyether urethane methacrylate or formulated multifunctional allphatic urethane acrylate and abrasive particles to form an adhesive skin of about 1 micron in thickness. The abrasive particles typically have a particle size ranging from about 0.05 to about 7 microns and a Mohs'"'"' hardness of at least about 7.
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Citations
29 Claims
- 1. A polishing device comprising a body made of porous polyvinyl acetal material having a uniform pore size throughout the body with over 80% of the pores being below 40 microns in diameter, said body being coated with a slurry comprising a hydrophillic urethane based adhesive and mixed abrasive particles of polishing materials which are cured on said body to form a thin abrasive skin which is absorbed into the body pores and follows the contour of the pores and an outer surface of said body.
- 12. A semiconductor polishing device comprising a core body made of porous polyvinyl acetal material having a cylindrical roller shape and a outer surface, said material having a uniform pore size throughout with at least 80% of the pores ranging from about 7 microns to about 40 microns in diameter, a slurry of adhesive hydrophilic polymer and abrasive particles ranging from 0.5 to about 100.0 microns and comprising from 5% to 80% of the slurry by weight, said slurry being coated and cured on said outer surface of said cylindrical roller forming an abrasive skin.
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17. A semiconductor polishing device comprising a substantially cylindrical roller body made of polyvinyl acetal having uniform porosity with 80% of its pores ranging from 7 to 40 microns and an abrasive particle and urethane adhesive composite skin cured to said body, said urethane adhesive being selected from the group consisting of aliphatic polyether urthane methacrylate, aromatic difunctional polyether urethane methacrylate and aliphatic urethane acrylate, said skin ranging in thickness from 0.5 to 7.0 microns.
- 18. A semiconductor polishing device comprising a body made of porous polyvinyl acetal material having a cylindrical roller shape and a outer surface, said material having a uniform pore size throughout with at least 80% of the pores ranging from about 7 microns to about 40 microns in diameter with a fluid flow through rate which does not distort the roller during the polishing process, a slurry comprising an adhesive of polyvinyl acetal material mixed with water and a composite abrasive material, said slurry having a viscosity less than the viscosity of the polyvinyl acetal material forming said device body, said composite abrasive material comprising particles of abrasive material mounted in carrier particles of polyvinyl acetal, said slurry being coated and cured on said outer surface of said cylindrical roller to form an abrasive skin.
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20. A process of making a semiconductor polishing roller comprising of the steps of:
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a. molding a roller body of clean porous polyvinyl acetal sponge with over 80% of the pores of said porous polyvinyl acetal sponge ranging from about 7 microns to about 40 microns in diameter;
b. applying a coating of a slurry comprising an adhesive and abrasive particles to the outer surface of said roller to form a skin; and
c. curing said slurry skin to said roller body with ultra violet light forming a unitary roller device with a thin abrasive skin. - View Dependent Claims (21, 22, 23, 24, 25)
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Specification