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Method of monitoring contact hole of integrated circuit using corona charges

  • US 6,803,241 B2
  • Filed: 01/09/2003
  • Issued: 10/12/2004
  • Est. Priority Date: 01/10/2002
  • Status: Expired due to Term
First Claim
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1. A method of monitoring contact holes of an integrated circuit, the method comprising:

  • transmitting corona charges over a unit chip having contact holes on a semiconductor wafer;

    measuring a surface voltage of the unit chip;

    making a graph illustrating a relationship between the amount of corona charges transmitted and the measured surface voltage of the unit chip; and

    analyzing the graph to determine whether the contact holes of the unit chip are open by determining a saturation level of the surface voltage of the unit chip or by determining if the surface voltage of the unit chip drops.

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