Light emitting device and method of manufacturing the same

• US 6,803,246 B2
• Filed: 10/10/2003
• Issued: 10/12/2004
• Est. Priority Date: 12/12/2000
• Status: Expired due to Term

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Arai, Yasuyuki, Yamazaki, Shunpei, Mizukami, Mayumi
• Primary Examiner(s): Nelms, David
• Assistant Examiner(s): TRAN, LONG K
• Application Number:
  US10/682,440
• Publication Number:
  US 20040075112A1
• Time in Patent Office: 368 Days
• Field of Search: 438/22, 438/29, 438/82, 438/99, 438/623, 438/725, 438/780, 438/800, 257/40, 257/59, 257/103
• US Class Current: 438/29
• CPC Class Codes: H01L 27/12 the substrate being other than a semiconductor body, e.g. an insulating body
• CPC Class Codes: H10K 50/805 Electrodes
• CPC Class Codes: H10K 50/841 Self-supporting sealing arrangements
• CPC Class Codes: H10K 50/844 Encapsulations
• CPC Class Codes: H10K 50/846 comprising getter material or desiccants
• CPC Class Codes: H10K 59/12 Active-matrix OLED [AMOLED] displays
• CPC Class Codes: H10K 59/122 Pixel-defining structures or layers, e.g. banks
• CPC Class Codes: H10K 59/131 Interconnections, e.g. wiring lines or terminals
• CPC Class Codes: H10K 59/17 Passive-matrix OLED displays
• CPC Class Codes: H10K 59/805 Electrodes
• CPC Class Codes: H10K 59/871 Self-supporting sealing arrangements
• CPC Class Codes: H10K 59/874 including getter material or desiccant

Abstract

Two aspects, an impurity factor and a structural factor are assumed as the deterioration causes of an organic light emitting device and means for solving the respective factors are provided. In order to prevent deterioration of the light emitting device, concentrations of moisture and oxygen, which are left in a space in which an organic light emitting element is sealed, are minimized. At the same time, an impurity including oxygen, such as moisture or oxygen which is included in an organic compound composing the organic light emitting element, is reduced. An element structure for preventing the deterioration of the organic light emitting element due to stress is used to suppress the deterioration.

Claims

1. A light emitting device having a pixel portion on a first insulating film, the pixel portion comprising:

a first electrode provided between a first wiring and a second wiring;

a first organic compound layer provided on the first electrode;

a second electrode provided on the first organic compound layer;

a third electrode provided between the second wiring and a third wiring;

a second organic compound layer provided on the third electrode; and

a fourth electrode provided on the second organic compound layer,

wherein the pixel portion is provided in a closed space produced by a sealing member, the closed space is filled with at least one gas selected from the group consisting of nitrogen, helium, argon, krypton and neon, and a concentration of oxygen and moisture in the closed space is 2 ppm or lower.

2. A light emitting device according to claim 1, wherein the light emitting device is at least one device selected from the group consisting of:

a monitor of a desktop personal computer, a video camera, a head-mounted EL display, a DVD, a goggle type display, a laptop personal computer, a portable telephone, a car audio equipment and a digital camera.

3. A method of manufacturing a light emitting device, the method comprising:

forming an organic compound layer;

performing thermal treatment of the organic compound layer at a reduced pressure after forming the organic compound layer;

forming an electrode on the organic compound layer;

sealing the organic compound layer in a closed space provided with a dry agent; and

performing heating and cooling of the organic compound layer after sealing the organic compound layer in the closed space.

4. A method of manufacturing a light emitting device according to claim 3, wherein performing heating and cooling comprises heating and cooling the organic compound layer multiple times.

5. A method of manufacturing a light emitting device according to claim 3, wherein performance heating and cooling comprises a heating temperature of 60°

C. or higher and lower than 100°

C. and a cooling temperature of 0°

C. or lower and higher than −

10°

C.

6. A method of manufacturing a light emitting device according to claim 3, wherein a dew point of a gas present in the closed space is −

50°

C. or lower.

7. A method of manufacturing a light emitting device according to claim 3, wherein a concentration of oxygen and moisture in the closed space is 50 ppm or lower.

8. A method of manufacturing a light emitting device according to claim 3, wherein the closed space is filled with at least one gas selected from the group consisting of nitrogen, helium, argon, krypton, and neon.

9. A method of manufacturing a light emitting device according to claim 3, wherein the dry agent comprises barium oxide.

10. A method of manufacturing a light emitting device, the method comprising:

forming a first insulating film;

forming a first electrode on the first insulating film;

forming a second electrode in contact with the first electrode and a second insulating film located on the second electrode;

forming an organic compound layer on the first electrode;

forming a third electrode on the organic compound layer;

sealing the organic compound layer in a closed space provided with a dry agent; and

performing heating and cooling of the organic compound after sealing the organic compound layer in the closed space.

11. A method of manufacturing a light emitting device according to claim 10, wherein performing heating and cooling comprises heating and cooling the organic compound layer multiple times.

12. A method of manufacturing a light emitting device according to claim 10, wherein performing heating and cooling comprises using a heating temperature of 60°

C. or higher and lower than 100°

C. and a cooling temperature of 0°

C. or lower and higher than −

10°

C.

13. A method of manufacturing a light emitting device according to claim 10, wherein a dew point of a gas present in the closed space is −

50°

C. or lower.

14. A method of manufacturing a light emitting device according to claim 10, wherein a concentration of oxygen and moisture in the closed space is 50 ppm or lower.

15. A method of manufacturing a light emitting device according to claim 10, wherein the closed space is filled with at least one gas selected from the group consisting of nitrogen, helium, argon, krypton, and neon.

16. A method of manufacturing a light emitting device according to claim 10, wherein the dry agent comprises barium oxide.

17. A method of manufacturing a light emitting device, the method comprising:

forming a first wiring, a first insulating layer provided on the first wiring, a second wiring, and a second insulating layer provided on the second wiring;

forming an organic compound layer in a self-alignment manner using the first insulating layer and the second insulating layer as masks;

forming a third electrode on the organic compound layer in a self-alignment manner using the first insulating layer and the second insulating layer as masks;

sealing the organic compound layer and the third electrode in a closed space provided with a dry agent; and

performing heating and cooling of the organic compound after sealing the organic compound layer and the third electrode in the closed space.

18. A method of manufacturing a light emitting device according to claim 17, wherein performing heating and cooling comprises heating and cooling the organic compound layer multiple times.

19. A method of manufacturing a light emitting device according to claim 17, wherein performing heating and cooling comprises using a heating temperature of 60°

C. or higher and lower than 100°

C. and a cooling temperature of 0°

C. or lower and higher than −

10°

C.

20. A method of manufacturing a light emitting device according to claim 17, wherein a dew point of a gas present in the closed space is −

50°

C. or lower.

21. A method of manufacturing a light emitting device according to claim 17, wherein a concentration of oxygen and moisture in the closed space is 50 ppm or lower.

22. A method of manufacturing a light emitting device according to claim 17, wherein the closed space is filled with at least one gas selected from the group consisting of nitrogen, helium, argon, krypton, and neon.

23. A method of manufacturing a light emitting device according to claim 17, wherein the dry agent comprises barium oxide.