Scintillator for electron microscope and method of making

• US 6,803,583 B2
• Filed: 03/21/2001
• Issued: 10/12/2004
• Est. Priority Date: 03/21/2001
• Status: Expired due to Fees

• Current Assignee: Me Taylor Engineering Incorporated
• Original Assignee: Me Taylor Engineering Incorporated
• Inventors: Taylor, Myron Eugene
• Primary Examiner(s): Lee, John R.
• Assistant Examiner(s): Fernandez, Kalimah
• Application Number:
  US09/812,880
• Publication Number:
  US 20020134937A1
• Time in Patent Office: 1,301 Days
• Field of Search: 250/397, 250/488.1, 250/486.1, 250/487.1
• US Class Current: 250/397
• CPC Class Codes: H01J 37/244 Detectors; Associated components or circuits therefor

Abstract

A scintillator for an electron microscope includes a substrate (24) of optically transparent material in disc shaped form, a retaining ring (20) of highly conductive material having a non-oxidizing surface around the substrate and having a radially inwardly extending lip (22) on one end, a coating of indium tin oxide (26) on surface (28) of the substrate, electrically conductive adhesive material (32) between the lip and the radially outer part of the coating, and scintillator material (36) bonded to surface (38) of the coating. The indium tin oxide coating may be applied by sputtering and the scintillator material may br deposited onto the coating by settlement deposition. All contacting surfaces are intimately bonded to provide maximum conductivity resulting in better signal to noise ratio. The conductive substrate minimizes pinhole interference, the scintillator is easier to handle during installation and no aluminum overcoating is required.

Claims

1. A scintillator for an electron microscope comprising:

a disc shaped substrate of optically clear material having a first surface and a second surface facing oppositely to said first surface, and a side wall portion forming an edge of said disc;

an indium tin oxide coating on said first surface having an outer surface on a side thereof opposite to that engaging said substrate;

an outer edge portion on said outer surface of said coating;

an electrically conductive retaining ring having opposite ends and a non-oxidizing exterior around said wall of said substrate;

a radially inwardly extending lip on one end of said ring overlying in spaced relation said outer edge portion of said outer surface on said indium tin oxide coating and forming a central opening in said one end of said ring;

an electrically conductive adhesive means between and connecting said overlying lip and said outer edge portion of said indium tin oxide coating;

a scintillator material having an inner surface electrically conductively connected to said outer surface on said indium tin oxide coating and extending through said central opening in said one end of said ring; and

an outer surface on said scintillator material opposite to said inner surface thereof connected to said indium tin oxide coating.

2. The scintillator claimed in claim 1, wherein:

said retaining ring comprises solid gold;

said substrate comprises quartz; and

said scintillator material comprises phosphor.

3. The scintillator claimed in claim 2 wherein:

said indium tin oxide coating has a thickness of 100 to 1000 angstom; and

said adhesive means comprises silver solder.

5. The scintillator as claimed in claim 1 wherein:

said retaining ring comprises copper having an exterior coating of gold;

said substrate comprises quartz; and

said scintillator material comprises phosphor.

6. The scintillator as claimed in claim 2 wherein:

said retaining ring has a side wall having a thickness of substantially 5 to 50 mils.

7. The scintillator as claimed in claim 1 wherein:

said scintillator material is planar in shape and has a thickness of approximately 10 to 400 μ

m.

8. The scintillator as claimed in claim 6 wherein:

said scintillator material has a thickness of approximately 10 to 400 μ

m.

4. The method of making a scintillator for an electron microscope comprising:

providing a disc shaped substrate of optically clear material having a first surface, a second oppositely facing surface, and an outer edge side wall;

applying a coating of indium tin oxide on said first surface of said substrate by sputtering;

providing an electrical conducting retaining ring having a non-oxidizing surface, an internal size to fit in close contacting engagement with said side wall of said substrate, and a radially inwardly extending lip on one end;

applying electrical conducting adhesive means on at least the radially outer edge portion of the exposed surface of said indium tin oxide coating;

fitting said retaining ring onto said substrate in close contacting engagement with said side wall of said substrate and said lip overlying in close contacting engagement with said radially outer edge portion of said indium tin oxide coating having said adhesive means thereon to bond said ring to said coating and said substrate; and

depositing scintillation material onto and in bonding relationship with said exposed surface of said coating.