Semiconductor hall sensor
First Claim
1. A semiconductor Hall sensor having a cross-shaped pattern that includes an input side pattern with a length and width of L1 and W1 and a output side pattern with a length and width of L2 and W2, said semiconductor Hall sensor being characterized in that:
- a film thickness, impurity concentration, the length L1 and width W1 of the input side pattern and length L2 and width W2 of the output side pattern are maintained; and
at least one of a resistance across input side terminals and a resistance across output side terminals is made 1.25 to 2.75 times a resistance of a cross-shaped pattern consisting of a rectangle with the length L1 and width W1 serving as the input side pattern, and a rectangle with the length L2 and width W2 serving as the output side pattern.
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Accused Products
Abstract
A semiconductor Hall sensor can reduce measuring error due to an unbalanced voltage by decreasing the unbalanced voltage, and improve resistance to electrostatic by suppressing maximum electric field in the sensor. A cross-shaped pattern of the semiconductor Hall sensor includes cutouts at its concave corners. Among the four concave corners of the cross-shaped pattern, consecutive two or four concave corners are provided with the cutouts. Besides, among the four concave corners of the cross-shaped patterns, the consecutive two or four concave corners have an acute angle at the intersection of the input terminal side pattern and output terminal side pattern. The semiconductor Hall sensor becomes insensitive to defects or unbalance of its pattern, thereby being able to reduce the unbalanced voltage as compared with a conventional cross-shaped pattern of the semiconductor Hall sensor.
17 Citations
11 Claims
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1. A semiconductor Hall sensor having a cross-shaped pattern that includes an input side pattern with a length and width of L1 and W1 and a output side pattern with a length and width of L2 and W2, said semiconductor Hall sensor being characterized in that:
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a film thickness, impurity concentration, the length L1 and width W1 of the input side pattern and length L2 and width W2 of the output side pattern are maintained; and
at least one of a resistance across input side terminals and a resistance across output side terminals is made 1.25 to 2.75 times a resistance of a cross-shaped pattern consisting of a rectangle with the length L1 and width W1 serving as the input side pattern, and a rectangle with the length L2 and width W2 serving as the output side pattern. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification