Microelectromechanical system (MEMS) with improved beam suspension

• US 6,803,755 B2
• Filed: 10/25/2001
• Issued: 10/12/2004
• Est. Priority Date: 09/21/1999
• Status: Expired due to Fees

• Current Assignee: Rockwell Automation Technologies Incorporated (Rockwell Automation, Inc.)
• Original Assignee: Rockwell Automation Technologies Incorporated (Rockwell Automation, Inc.)
• Inventors: Larsson, Henric, Annis, Jeffrey R., Herbert, Patrick C., Yao, Jun J., Morris, Winfred L., Kretschmann, Robert J., Harris, Richard D.
• Primary Examiner(s): Nguyen, Vinh P.
• Application Number:
  US10/001,412
• Publication Number:
  US 20020070723A1
• Time in Patent Office: 1,083 Days
• Field of Search: 324/99.R, 324/158.1, 324/252, 324/259-260, 310/306-307, 333/42, 333/189, 333/240, 333/24, 735/141.6
• US Class Current: 324/99.00R
• CPC Class Codes: B81B 2201/032 Bimorph and unimorph actuators, e.g. piezo and thermo
• CPC Class Codes: B81B 2203/0109 Bridges
• CPC Class Codes: B81B 2203/051 Translation according to an axis parallel to the substrate
• CPC Class Codes: B81B 3/0072 For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
• CPC Class Codes: H03H 9/462 Microelectro-mechanical filters

Abstract

In a MEMS device employing a beam supported by transverse arms, potential bowing of the transverse arms caused by fabrication processes, temperature or local self-heating from resistive losses is accommodated by flexible terminations of the transverse arms. Alternatively, this bowing is controlled so as to provide selective biasing to the beam or mechanical advantage in the sensing of beam motion.

Claims

1. A microelectromechanical system (MEMS) comprising:

a beam supported on flexible transverse arms to move longitudinally along a substrate, wherein ends of the arms removed from the beam are connected to the substrate by flexible elements allowing transverse movement of the ends of the arms.

2. A microelectromechanical system (MEMS) comprising:

a beam supported on flexible transverse arms to move longitudinally along a substrate, wherein ends of the arms removed from the beam are connected to the substrate by flexible longitudinally extending wrist elements.

3. The microelectromechanical system of claim 2 wherein the wrist elements are serpentine.

4. The microelectromechanical system of claim 3 wherein the ends of the arms removed from the beam are serpentine.

5. The microelectromechanical system of claim 2 wherein the ends of the arms removed from the beam are serpentine.

6. The microelectromechanical system of claim 2 wherein the beam is supported at longitudinally opposed ends by respective pairs of transverse arms extending from the beam on opposite sides of the beam and wherein the wrist elements for the transverse arms extend in a longitudinal direction toward the center of the beam.

7. The microelectromechanical system of claim 2 wherein the beam is supported at opposed ends by respective pairs of transverse arms extending from the beam on opposite sides of the beam and wherein the wrist elements for the transverse arms extend in a longitudinally direction away the center of the beam.

8. The microelectromechanical system of claim 2 wherein the transverse arms and wrist elements are conductive.

9. The microelectromechanical system of claim 2 wherein including a magnetic field.

10. The microelectromechanical system of claim 2 wherein the transverse arms are of equal length.

11. The microelectromechanical system of claim 2 wherein a point of attachment of the transverse arms at the intermediate point is centered between points of attachment of the transverse arms at the opposed ends of the beam.

12. The microelectromechanical system of claim 2 wherein a first opposing of the beam supports an actuator selected from the group consisting of a Lorentz force motor, an electrostatic motor, a piezoelectric motor, a thermal-expansion motor, and a mechanical-displacement motor.

13. The microelectromechanical system of claim 2 wherein the center arm supports a sensing device selected from the group consisting of:

a capacitive sensor, a piezoelectric sensor, a photoelectric sensor, a resistive sensor, an optical switching sensor and an inductive sensor.

14. The microelectromechanical system of claim 2 wherein the ends of the transverse arms removed from the beam are connected to a free end of a transverse expansion element attached to the substrate only at a point proximate to the beam.

15. A microelectromechanical system (MEMS) comprising:

a beam supported on flexible transverse arms to move longitudinally along a substrate, wherein ends of the arms removed from the beam are connected to a free end of a transverse expansion element attached to the substrate only at a point proximate to the beam.

16. A microelectromechanical system (MEMS) comprising:

a beam supported on a first pair of flexible transverse arms that are substantially aligned with one another and extend away from the beam in opposite directions;

a substrate, and

a first pair of pylons supported by the substrate, wherein a respective end of each of the first pair of transverse arms is coupled to a respective one of the first pair of pylons by a respective one of a first pair of wrist components, so that the transverse arms and the beam are supported above the substrate and so that the beam is able to move in relation to the substrate.

17. The microelectromechanical system of claim 16 wherein the wrist components are serpentine.

18. The microelectromechanical system of claim 17 wherein the ends of the arms removed from the beam are serpentine.

19. The microelectromechanical system of claim 16 wherein the ends of the arms removed from the beam are serpentine.

20. The microelectromechanical system of claim 16 wherein the beam is supported at a first end by the first pair of transverse arms and is supported at a second end by a second pair of transverse arms.

21. The microelectromechanical system of claim 16 wherein the transverse arms and wrist components are conductive.

22. The microelectromechanical system of claim 16, further including a magnetic field.

23. The microelectromechanical system of claim 16, wherein the pylons are each positioned adjacent to the beam and wherein each of the pylons is coupled to a respective one of the wrist components by a respective expansion element extending outward away from the beam to the respective wrist component.

24. The microelectromechanical system of claim 23, wherein at least portions of expansion elements have a first width that is greater than a second width of the transverse arms.

25. The microelectromechanical system of claim 16 wherein the transverse arms are of equal length.

26. A microelectromechanical system (MEMS) comprising:

a beam having a longitudinal axis;

first, second and third pairs of flexible transverse arms, wherein the arms of first, second and third pairs extend outward from first, second, and third regions of the beam in substantially opposite directions from the first, second and third regions of the beam, respectively; and

a substrate, wherein the beam is supported above the substrate for movement along its longitudinal axis, and wherein the beam is supported by the first, second and third pairs of flexible transverse arms, which in turn are supported by first, second and third pairs of wrist components that are at least indirectly supported by the substrate.

27. The microelectromechanical system of claim 26 wherein at least some of the ends of the transverse arms are serpentine.

28. The microelectromechanical system of claim 26 wherein at least some of the transverse arms and wrist components are conductive.

29. The microelectromechanical system of claim 26, wherein at least some of the wrist components are coupled by respective intermediate arms to respective pylons, which in turn are supported by the substrate.

30. The microelectromechanical system of claim 29, wherein the pylons are positioned adjacent to the beam.

31. The microelectromechanical system of claim 29, wherein at least portions of the intermediate arms have a first width that is greater than a second width of the transverse arms.

32. A microelectromechanical system (MEMS) comprising:

a beam having a first axis;

a pair of arms coupled to the beam and extending outward from the beam in opposite directions along a second axis that is substantially perpendicular to the first axis;

a pair of flexible end portions coupled respectively to a pair of ends of the respective arms; and

a pair of supports coupled respectively to the pair of flexible end portions, the pair of supports being formed on a substrate,

wherein at least a portion of each of the supports has a first width that is greater than a second width of the respective arms.

33. The microelectromechanical system of claim 32, wherein each of the supports is at least one of a pylon positioned adjacent to the beam and an expansion element.

34. The microelectromechanical system of claim 32, wherein the beam moves longitudinally along the first axis.