MEMS varactor for measuring RF power
First Claim
1. A meter for measuring an AC signal characterized by a frequency f, said meter comprising:
- a first capacitor for receiving said AC signal, said first capacitor having first and second plates separated by a distance that depends on the root-mean-squared potential of said AC signal, but not on changes in said AC signal that occur over a time of 1/f;
a second capacitor having first and second plates separated by a distance that depends on the separation of said first and second plates in said first capacitor; and
a circuit for measuring the capacitance of said second capacitor.
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Abstract
A meter for measuring the root-mean-squared potential of an AC signal characterized by a frequency f is disclosed. The meter includes first and second capacitors. The AC signal is applied to the first capacitor, which includes first and second plates separated by a distance that depends on the root-mean-squared potential of the AC signal, but not on changes in the AC signal that occur over a time of 1/f. The second capacitor has first and second plates separated by a distance that depends on the separation of the first and second plates in the first capacitor. A detection circuit measures the capacitance of the second capacitor. The first plate of the first capacitor is preferably connected to the first plate of the second capacitor by a non-conducting mechanical link.
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Citations
5 Claims
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1. A meter for measuring an AC signal characterized by a frequency f, said meter comprising:
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a first capacitor for receiving said AC signal, said first capacitor having first and second plates separated by a distance that depends on the root-mean-squared potential of said AC signal, but not on changes in said AC signal that occur over a time of 1/f;
a second capacitor having first and second plates separated by a distance that depends on the separation of said first and second plates in said first capacitor; and
a circuit for measuring the capacitance of said second capacitor. - View Dependent Claims (2)
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3. A meter for measuring an AC signal characterized by a frequency f, said meter comprising:
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a first capacitor for receiving said AC signal, said first capacitor having first and second plates separated by a distance that depends on the root-mean-squared potential of said AC signal, but not on changes in said AC signal that occur over a time of 1/f;
a second capacitor having first and second plates separated by a distance that depends on the separation of said first and second plates in said first capacitor; and
a circuit for measuring the capacitance of said second capacitor, wherein said first plate of said first capacitor is connected to said first plate of said second capacitor by a non-conducting mechanical link.
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4. A method for measuring the root-mean-squared potential of an AC signal characterized by a frequency f, said method comprising:
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applying said AC signal across the plates of a first capacitor, said first capacitor having first and second plates separated by a distance that depends on the root-mean-squared potential of said AC signal, but not on changes in said AC signal that occur over a time of 1/f;
providing a second capacitor having first and second plates separated by a distance that depends on the separation of said first and second plates in said first capacitor; and
measuring the capacitance of said second capacitor.
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5. A method for measuring the root-mean-squared potential of an AC signal characterized by a frequency f, said method applying said AC signal across the plates of a first capacitor, said first capacitor having first and second plates separated by a distance that depends on the root-mean-squared potential of said-AC signal, but not on changes in said AC signal that occur over a time of 1/f;
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providing a second capacitor having first and second plates separated by a distance that depends on the separation of said first and second plates in said first capacitor; and
measuring the capacitance of said second capacitor, wherein said first plate of said first capacitor is connected to said first plate of said second capacitor by a non-conducting mechanical link.
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Specification