Multilayer hinge structures for micro-mirror arrays in projection displays
First Claim
Patent Images
1. A spatial light modulator comprising:
- an array of micro-mirrors on a substrate, each micro-mirror of the array comprising a reflective mirror plate held by a hinge on the substrate, wherein the mirror plate and hinge extend substantially parallel to the substrate when the mirror plate is in an undeflected position, wherein the hinge is a multilayer hinge having a first and second layer wherein the first layer is more electrically conductive than the second layer, and wherein the first layer is more narrow than the second layer in a direction substantially parallel to the substrate.
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Abstract
A method and an improved multilayer hinge structure for use in a micromirror device for a spatial light modulator are provided herein. The micromirror device presents a conductive, composite torsion hinge with improved mechanical reliability, achieved by optimizing the geometry of the hinge, which minimizes the amount of residual twist, fixed torsional stiffness and fixed rate of plastic deformation in the mechanically undesirable hinge element. A method and its alternatives are disclosed herein by the present invention for manufacturing such multilayer hinge structure.
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Citations
92 Claims
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1. A spatial light modulator comprising:
an array of micro-mirrors on a substrate, each micro-mirror of the array comprising a reflective mirror plate held by a hinge on the substrate, wherein the mirror plate and hinge extend substantially parallel to the substrate when the mirror plate is in an undeflected position, wherein the hinge is a multilayer hinge having a first and second layer wherein the first layer is more electrically conductive than the second layer, and wherein the first layer is more narrow than the second layer in a direction substantially parallel to the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 90, 91)
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34. A spatial light modulator comprising:
an array of micro-mirrors on a substrate, each micro-mirror of the array comprising a reflective mirror plate held by a hinge on the substrate at the contact, wherein the mirror plate and hinge extend substantially parallel to the substrate when the mirror plate is in an undeflected position, wherein the hinge is a multilayer hinge having a first and second layer wherein the first layer has a creep rate higher than that of the second layer at the operating temperature of the spatial light modulator, and wherein the first layer is more narrow than the second layer in a direction substantially parallel to the substrate. - View Dependent Claims (35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65)
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66. A method of making a micro-mirror device, the device comprising a hinge and a micro-mirror plate attached to the hinge such that the micro-mirror plate can rotate relative to the substrate by the hinge, the method comprising:
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providing a substrate;
depositing a first sacrificial layer on the substrate;
forming either a hinge or a micro-mirror plate on the first sacrificial layer;
depositing a second sacrificial layer;
forming a micro-mirror plate or hinge on the second sacrificial;
wherein the forming of the hinge on either the first or second sacrificial layer comprises;
depositing a second layer comprised of a material with a creep rate lower than that of the first layer;
depositing a first layer that comprises a material with a creep rate higher than that of the second layer;
patterning the first layer so as to have a width that is 50% or less of the width of the second layer; and
forming a hinge support to connect the hinge directly or indirectly to the substrate; and
removing the first and second sacrificial layers so as to release the micro-mirror device. - View Dependent Claims (67, 68, 69, 70, 71)
depositing a third layer prior to depositing the second layer, the third layer comprised of a material with a creep rate greater than that of the second layer at the operating temperature of the device.
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68. The method of claim 67, wherein prior to depositing the second first layer is patterned to have a width less than the width of the second layer after patterning.
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69. The method of claim 68, wherein the third layer is patterned to have a width that is 50% or less of the width of the second layer after patterning.
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70. The method of claim 66, wherein the first and third layers are patterned to have widths of 33% or less of the width of the second layer after patterning.
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71. The method of claim 70, wherein the first and third layers are patterned to have widths of 25% or less of the width of the second layer after patterning.
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72. A method of making a micro-mirror device, the device comprising a hinge and a micro-mirror plate attached to the hinge such that the micro-mirror plate can rotate relative to the substrate by the hinge, the method comprising:
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providing a substrate;
depositing a first sacrificial layer on the substrate;
forming either a hinge or a micro-mirror plate on the first sacrificial layer;
depositing a second sacrificial layer;
forming a micro-mirror plate or hinge on the second sacrificial;
wherein the forming of the hinge on either the first or second sacrificial layer comprises;
depositing a second layer comprised of a material with a resistivity higher than 1012 μ
Ω
·
cm at the operating temperature of the device;
depositing a first layer that comprises a material with a resistivity less than that of the second layer;
patterning the first layer so as to have a width that is 50% or less of the width of the second layer; and
forming a hinge support to connect the hinge directly or indirectly to the substrate; and
removing the first and second sacrificial layers so as to release the micro-mirror device. - View Dependent Claims (73, 74, 75, 76, 77)
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78. A method of making a micro-mirror device, the device comprising a hinge and a micro-mirror plate attached to the hinge such that the micro-mirror plate can rotate relative to a substrate by the hinge, the method comprising:
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providing the substrate;
depositing a first sacrificial layer on t he substrate;
forming the micro-mirror plate on the first sacrificial layer;
depositing a second sacrificial layer on the micro-mirror plate;
patterning the second sacrificial layer according to a structure of the hinge;
forming the hinge on the patterned second sacrificial layer, further comprising;
depositing a bottom layer that comprises a material with resistivity higher than 1012 μ
Ω
·
cm at the operating temperature of the device;
depositing a top layer that comprises a material with resistivity lower than 100,000 μ
Ω
·
cm at the operating temperature of the device;
narrowing the topmost layer to cover at least 50% of the bottom layer surface by means of patterning and/or etching; and
providing a means to connect the bottom and top layers directly or indirectly to the substrate; and
removing the first and second sacrificial layers so that the bottom and top layers are free to move relative to the substrate. - View Dependent Claims (79)
depositing a bottom layer comprised of a material with resistivity lower than 100,000 μ
Ω
·
cm at the operating temperature of the device;
depositing an intermediate layer that comprises a material with resistivity higher than 1012 μ
Ω
·
cm at the operating temperature of the device;
depositing a top layer that comprises a material with resistivity lower than 100,000 μ
Ω
·
cm at the operating temperature of the device;
narrowing the topmost layer to cover at least 50% of the bottom layer surface by means of patterning and/or etching; and
providing a means to connect the bottom, intermediate, and top layers directly or indirectly to the substrate.
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80. A method of making a micro-mirror device, the device comprising a hinge and a micro-mirror plate attached to the hinge such that the micro-mirror plate can rotate relative to a substrate by the hinge, the method comprising:
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providing the substrate;
depositing a first sacrificial layer on the substrate;
forming the micro-mirror plate on the first sacrificial layer;
depositing a second sacrificial layer on the micro-mirror plate;
patterning the second sacrificial layer;
forming the hinge on the patterned second sacrificial layer so as to connect to both the micro-mirror plate and the substrate, the forming the hinge comprising;
depositing a layer that comprises an electrical conductor;
depositing a layer that comprises an electrical insulator;
depositing a layer that comprises an electrical conductor, wherein at least one of the electrical conductor layers has a width 50% or less than that of the width of the insulator; and
removing the first and second sacrificial layers such that the micro-mirror plate is free to move relative to the substrate . - View Dependent Claims (81, 82, 84)
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83. The method of claim m 80, wherein the conducting layers comprise titanium.
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85. A micromirror device, comprising:
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a substrate;
a mirror plate; and
a hinge, to which the mirror plate is attached such that the mirror plate rotates along the hinge, the hinge further comprising;
a first layer having a first stress gradient;
a second layer formed on and contact the first layer such that the first layer has a stress gradient that is less than the first stress gradient. - View Dependent Claims (86, 87, 88, 89)
a third layer on which the first layer is formed, wherein the third layer has a width that is shorter than a width of the first layer.
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89. The method of claim 88, further comprising:
a fourth layer disposed on the three layers including the first, second and third layers such that the three layers are wrapped by the fourth layer.
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92. A microelectromechanical device comprising:
a movable element on a substrate, each movable element comprising a plate held by a hinge on the substrate, wherein the plate and hinge extend substantially parallel to the substrate when the plate is in an undeflected position, wherein the hinge is a multilayer hinge having a first layer that is more electrically conductive than a second layer, and wherein the first layer is more narrow than the second layer in a direction substantially parallel to the substrate.
Specification