Please download the dossier by clicking on the dossier button x
×

Micro mirror unit including mirror substrate and wiring substrate spaced by conductive spacer

  • US 6,806,992 B2
  • Filed: 12/31/2002
  • Issued: 10/19/2004
  • Est. Priority Date: 05/24/2002
  • Status: Active Grant
First Claim
Patent Images

1. A micro mirror unit comprising:

  • a micro mirror substrate that includes a mirror-formed portion, a first frame surrounding the mirror-formed portion, first torsion bars connecting the mirror-formed portion to the first frame, second frame surrounding the first frame, and second torsion bars connecting the first frame to the second frame;

    a wiring substrate formed with a wiring pattern; and

    a plurality of electroconductive spacers for electrically connecting the micro mirror substrate to the wiring pattern and for spacing the micro mirror substrate and the wiring substrate apart from each other;

    wherein the second frame includes a plurality of electroconductive islands electrically separated from each other, each of the electroconductive spacers being connected to a respective one of the electroconductive islands.

View all claims
  • 3 Assignments
Timeline View
Assignment View
    ×
    ×