Method for lubricating MEMS components
First Claim
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1. A method of manufacturing a MEMS assembly, comprising:
- providing a MEMS device on an assembly substrate;
coupling an assembly lid to the assembly substrate and over the MEMS device to create an interior of the MEMS assembly housing the MEMS device, the coupling maintaining an opening to the interior of the MEMS assembly; and
coating the MEMS device through the opening.
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Abstract
The present invention provides, in one aspect, a method of manufacturing a MEMS assembly. In one embodiment, the method includes mounting a MEMS device, such as a MEMS mirror array, on an assembly substrate. The method further includes coupling an assembly lid to the assembly substrate and over the MEMS device to create an interior of the MEMS assembly housing the MEMS device, whereby the coupling maintains an opening to the interior of the MEMS assembly. Furthermore, the method includes lubricating/passivating the MEMS device through the opening. In addition, a MEMS assembly constructed according to a process of the present invention is also disclosed.
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Citations
20 Claims
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1. A method of manufacturing a MEMS assembly, comprising:
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providing a MEMS device on an assembly substrate;
coupling an assembly lid to the assembly substrate and over the MEMS device to create an interior of the MEMS assembly housing the MEMS device, the coupling maintaining an opening to the interior of the MEMS assembly; and
coating the MEMS device through the opening. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A MEMS assembly constructed according to a process comprising:
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providing a MEMS device on an assembly substrate;
coupling an assembly lid to the assembly substrate and over the MEMS device to create an interior of the MEMS assembly housing the MEMS device, the coupling maintaining an opening to the interior of the MEMS assembly; and
coating the MEMS device through the opening. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification