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Method for lubricating MEMS components

  • US 6,806,993 B1
  • Filed: 06/04/2003
  • Issued: 10/19/2004
  • Est. Priority Date: 06/04/2003
  • Status: Active Grant
First Claim
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1. A method of manufacturing a MEMS assembly, comprising:

  • providing a MEMS device on an assembly substrate;

    coupling an assembly lid to the assembly substrate and over the MEMS device to create an interior of the MEMS assembly housing the MEMS device, the coupling maintaining an opening to the interior of the MEMS assembly; and

    coating the MEMS device through the opening.

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