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Adaptive off tester screening method based on intrinsic die parametric measurements

  • US 6,807,655 B1
  • Filed: 07/16/2002
  • Issued: 10/19/2004
  • Est. Priority Date: 05/17/2002
  • Status: Expired due to Fees
First Claim
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1. A method of determining the disposition of a semiconductor die and controlling the level of stringency used in determining the disposition, the method comprising:

  • measuring at least a first parameter for each of a plurality of dies, wherein the at least a first parameter includes at least one of the groups consisting of channel length, oxide thickness, current, and speed for the dies;

    quantizing the plurality of dies into a plurality of groups according to the values of the first measured parameter, the groups based on an upper limit and a lower limit for the first measured parameter;

    determining a statistical distribution for the dies in each of the plurality of groups;

    determining an intrinsic distribution function for the plurality of dies from the statistical distribution;

    setting an adaptive screening limit corresponding to the intrinsic distribution function; and

    identifying whether the die falls outside the adaptive screening limit.

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