Pressure sensor with a radially tensioned metal diaphragm
First Claim
1. A pressure sensor for measuring fluid pressure, said pressure sensor including:
- a first body member;
a second body member; and
a radially tensioned flexible diaphragm disposed between said first body member and said second body member, said first body member and said diaphragm forming a first fluid chamber, said second body member and said diaphragm forming a second fluid chamber;
said first body member being formed from a first material having a first coefficient of thermal expansion, said diaphragm being formed from a second material having a second coefficient of thermal expansion, wherein said first coefficient of thermal expansion is not greater than said second coefficient of thermal expansion by more than approximately 0.0000015 inch/inch/°
F.
2 Assignments
0 Petitions
Accused Products
Abstract
A pressure sensor having a radially tensioned diaphragm for measuring fluid pressure. The pressure sensor includes a first generally concave metal body member and a second generally concave metal body member, and a radially tensioned flexible metal diaphragm located therebetween that is tensioned by heating the sensor. The first and second body members are formed from a material having a coefficient of thermal expansion in the range of approximately 0.0000056 inch/inch/° F. to 0.0000064 inch/inch/° F. The diaphragm is formed from a precipitation hardening metal material having a coefficient of thermal expansion of approximately 0.0000060 inch/inch/° F. The first body member and the second body member are formed from a ferromagnetic metal material such that the first and second body members shield the diaphragm from magnetic fields which may otherwise cause movement of the diaphragm.
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Citations
20 Claims
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1. A pressure sensor for measuring fluid pressure, said pressure sensor including:
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a first body member;
a second body member; and
a radially tensioned flexible diaphragm disposed between said first body member and said second body member, said first body member and said diaphragm forming a first fluid chamber, said second body member and said diaphragm forming a second fluid chamber;
said first body member being formed from a first material having a first coefficient of thermal expansion, said diaphragm being formed from a second material having a second coefficient of thermal expansion, wherein said first coefficient of thermal expansion is not greater than said second coefficient of thermal expansion by more than approximately 0.0000015 inch/inch/°
F.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A pressure sensor for measuring fluid pressure, said pressure sensor including:
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a first body member;
a second body member; and
a radially tensioned flexible diaphragm disposed between said first body member and said second body member, said first body member and said diaphragm forming a first fluid chamber, said second body member and said diaphragm forming a second fluid chamber;
said first body member and said second body member being formed from a ferromagnetic material such that said first and second body members shield said diaphragm from magnetic fields which may otherwise cause movement of said diaphragm resulting in an inaccurate measurement of the fluid pressure applied to said diaphragm. - View Dependent Claims (15, 16, 17, 18)
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19. A pressure sensor for measuring fluid pressure, said pressure sensor including:
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a first metal body member and a second metal body member, said first and second body members being heat treated to greater than 900°
F.;
a flexible metal diaphragm disposed between said first and second body members, said diaphragm being in an annealed condition and formed from a precipitation hardening material, said first body member and said diaphragm forming a first fluid chamber, and said second body member and said diaphragm forming a second fluid chamber. - View Dependent Claims (20)
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Specification