Method for manufacturing a substrate for a display panel
First Claim
1. A method for manufacturing a substrate for a display panel, comprising:
- a step of forming an organic insulating film on a light transmissive substrate; and
a step of patterning the organic insulating film to form a first opening and a second opening smaller than the first opening as through holes therein, wherein the patterning step comprises a lithography process of selectively exposing the organic insulating film to light with the use of a photomask and removing the light-exposed portions, the photomask being so set that the average light transmittance is lower at a light transmissive area for the first opening than at a light transmissive area for the second opening.
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0 Petitions
Accused Products
Abstract
A manufacturing method of a substrate for display panel comprises a step of forming an organic insulating film on a light transmissive substrate and a step of patterning the organic insulating film to form a first opening and a second opening smaller than the first opening formed as through holes therein. In particular, this patterning step includes a lithography process of selectively exposing the organic insulating film to light with the use of a photomask and removing the light-exposed portions, the photomask being so set that the average light transmittance is lower at a light transmissive area for the first opening than at a light transmissive area for the second opening.
9 Citations
16 Claims
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1. A method for manufacturing a substrate for a display panel, comprising:
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a step of forming an organic insulating film on a light transmissive substrate; and
a step of patterning the organic insulating film to form a first opening and a second opening smaller than the first opening as through holes therein, wherein the patterning step comprises a lithography process of selectively exposing the organic insulating film to light with the use of a photomask and removing the light-exposed portions, the photomask being so set that the average light transmittance is lower at a light transmissive area for the first opening than at a light transmissive area for the second opening. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification