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MEMS device

  • US 6,809,848 B2
  • Filed: 06/01/2001
  • Issued: 10/26/2004
  • Est. Priority Date: 06/01/2001
  • Status: Expired due to Term
First Claim
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1. A device comprising:

  • an array of electrostatically activated members formed in a layer comprising silicon; and

    a substrate comprising a ceramic material and including conductors formed on a major surface thereof and in via holes formed therethrough the conductors being positioned with respect to and separate from the silicon layer so as to selectively operate the array of members using an electrostatic force such that the utilization of conductors on the silicon layer is not required.

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