Apparatus and method for mass flow controller with network access to diagnostics

• US 6,810,308 B2
• Filed: 06/24/2002
• Issued: 10/26/2004
• Est. Priority Date: 06/24/2002
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Shajii, Ali, Ambrosina, Jesse, Kottenstette, Nicholas
• Primary Examiner(s): Gandhi, Jayprakash N.
• Application Number:
  US10/178,884
• Publication Number:
  US 20030236592A1
• Time in Patent Office: 855 Days
• Field of Search: 700/1, 700/281, 700/275, 700/282, 700/301, 137/599.04, 137/599.05, 137/486, 137/487.5, 702/45
• US Class Current: 700/282
• CPC Class Codes: G01F 1/684 Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
• CPC Class Codes: G01F 1/6965 comprising means to store calibration data for flow signal calculation or correction
• CPC Class Codes: G01F 1/86 Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
• CPC Class Codes: G01F 25/15 specially adapted for gas meters G01F25/11 - G01F25/14, G01F25/17 take precedence
• CPC Class Codes: G01F 5/00 Measuring a proportion of the volume flow
• CPC Class Codes: G05D 7/0635 by action on throttling means G05D7/0688, G05D7/0694 take precedence
• CPC Class Codes: Y10T 137/87298 Having digital flow controller

Abstract

A mass flow controller includes a network interface port and interface software that provide direct access to the mass flow controller. The mass flow controller also includes diagnostic software that permits a technician to execute diagnostics through the network interface port.

Claims

1. A mass flow controller comprising:

a mass flow sensor constructed and arranged so as to produce a mass flow signal representative of and in response to the rate of gas flow through the mass flow controller; and

an electronic controller connected to the mass flow sensor and constructed and arranged so as to produce a closed loop control signal for an outlet valve as a function of the closed loop control signal and so as to control the rate of gas flow through the mass flow controller, said electronic controller also configured to provide a network interface constructed and arranged so as to permit the controller to be connected to a network, and so to allow for the execution of mass flow controller active diagnostics from a device connected to the network.

2. The mass flow controller of claim 1, further including active diagnostics code, and wherein the active diagnostics code is operational with the electronic controller and includes code to enable the manipulation of operational signals from a device connected to the network.

3. The mass flow controller of claim 2, further including active diagnostics code, and wherein the active diagnostics code is operational with the electronic controller and includes code to enable the manipulation of diagnostic signals from a device connected to the network.

4. The mass flow controller of claim 2, further including active diagnostics code, and wherein the active diagnostics code is operational with the electronic controller and includes code to enable the monitoring of operational signals from a device connected to the network.

5. The mass flow controller of claim 2, further including active diagnostics code, and wherein the active diagnostics code is operational with the electronic controller and includes code to enable the monitoring of diagnostic signals from a device connected to the network.

6. The mass flow controller of claim 2, further comprising:

on-line diagnostics code operational with the electronic controller that enables on-line monitoring of operational signals from a device connected to the network.

7. The mass flow controller of claim 2, further comprising:

on-line diagnostics code operational with the electronic controller that enables on-line monitoring of diagnostic signals from a device connected to the network.

8. The mass flow controller of claim 2, further comprising:

on-line diagnostics code operational with the electronic controller that enables on-line manipulation of diagnostic signals from a device connected to the network.

9. The mass flow controller of claim 2, further comprising:

on-line diagnostics code operational with the electronic controller that enables on-line manipulation of operational signals from a device connected to the network.

10. A mass flow controller comprising:

a mass flow sensor configured so as to produce a mass flow signal representative of and in response to the rate gas flow through the mass flow controller; and

an electronic controller connected to the mass flow sensor and constructed and arranged so as to produce a closed loop control signal for an outlet valve as a function of said mass flow signal, wherein said electronic controller comprises a dual-processor controller that is configured so as to provide a network interface so that the controller can be connected to a network so as to permit the execution of mass flow controller active diagnostics from a device connected to the network.

11. The mass flow controller of claim 10, further including active diagnostics code, and wherein the active diagnostics code is operational with the electronic controller and includes code to enable the manipulation of operational mass flow controller signals from a device connected to the network.

12. The mass flow controller of claim 10, further including active diagnostics code, and wherein the active diagnostics code is operational with the electronic controller and includes code to enable the manipulation of diagnostic mass flow controller signals from a device connected to the network.

13. The mass flow controller of claim 10, further including active diagnostics code, and wherein the active diagnostics code is operational with the electronic controller and includes code to enable the monitoring of operational mass flow controller signals from a device connected to the network.

14. The mass flow controller of claim 10, further including active diagnostics code, and wherein the active diagnostics code is operational with the electronic controller and includes code to enable the monitoring of diagnostic mass flow controller signals from a device connected to the network.

15. The mass flow controller of claim 10, further comprising:

on-line diagnostics code operational with the electronic controller so as to enable on-line monitoring of mass flow controller signals from a device connected to the network.

16. The mass flow controller of claim 10, further comprising:

on-line diagnostics code operational with the electronic controller so as to enable on-line manipulation of mass flow controller signals from a device connected to the network.

17. The mass flow controller of claim 10, wherein said dual processors include a deterministic processor configured so as to operate in a deterministic mode and a non-deterministic processor constructed and arranged so as to operate in a non-deterministic mode, the deterministic processor being configured to produce said closed loop control signal for an outlet valve.

18. The mass flow controller of claim 17, wherein the deterministic processor is configured to acquire one or more sensor readings from the mass flow sensor.

19. The mass flow controller of claim 18, wherein the mass flow sensor is a thermal mass flow sensor, including a sensor bypass, constructed and arranged so as to sense the flow of gas into the inlet of the controller, and the mass flow controller further comprises a pressure sensor constructed and arranged so as provide a pressure signal as a function of the gas pressure in the volume between the thermal mass flow sensor bypass and the control valve, and said deterministic processor is configured to acquire the pressure signal produced by said pressure sensor and to compensate the sensed inlet flow rate sensed by said mass flow sensor as a function of the pressure signal to thereby produce a compensated measure of the rate of gas flow out of the controller.

20. The mass flow controller of claim 19, wherein the deterministic processor is configured to compute the time rate of change of pressure within the volume between the sensor bypass and the outlet control valve, and to use this time rate of change of pressure to produce the compensated measure of the rate of fluid flow out of the controller.

21. The mass flow controller of claim 10, wherein the network interface comprises a web server that enables a web-enabled device connected to the world wide web to execute on-line diagnostics from the web-enabled device.

22. The mass flow controller of claim 10, wherein the mass flow controller is self-calibrating.