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Defective pixel compensation method

  • US 6,813,062 B2
  • Filed: 09/08/2003
  • Issued: 11/02/2004
  • Est. Priority Date: 11/28/2001
  • Status: Expired due to Fees
First Claim
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1. A method for compensating the impact of at least one defective pixel with a known position in at least one spatial light modulator (SLM) when creating a pattern of said at least one SLM on a work piece covered at least partly with a layer sensitive to electromagnetic radiation, comprising the actions of:

  • projecting an image of said at least one SLM on a detector arrangement to measure a dose of radiation; and

    performing a compensation of said defective pixel by at least one of the most adjacent pixels in said at least one SLM.

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