Long wavelength VCSEL with tunnel junction, and implant

• US 6,813,293 B2
• Filed: 11/21/2002
• Issued: 11/02/2004
• Est. Priority Date: 11/21/2002
• Status: Expired due to Fees

• Current Assignee: II-VI Delaware, Inc. (Coherent Corp.)
• Original Assignee: Finisar Corporation (II-VI Incorporated)
• Inventors: Wang, Tzu-Yu, Johnson, Ralph H.
• Primary Examiner(s): Phan, Tho
• Assistant Examiner(s): Flores Ruiz, Delma R.
• Application Number:
  US10/301,380
• Publication Number:
  US 20040101009A1
• Time in Patent Office: 712 Days
• Field of Search: 372/43-50, 372/99
• US Class Current: 372/46.015
• CPC Class Codes: H01S 5/04254 characterised by the shape
• CPC Class Codes: H01S 5/04257 having positive and negative electrodes on the same side of the substrate
• CPC Class Codes: H01S 5/18308 having a special structure for lateral current or light confinement
• CPC Class Codes: H01S 5/18311 using selective oxidation
• CPC Class Codes: H01S 5/18316 Airgap confined
• CPC Class Codes: H01S 5/1833 with more than one structure
• CPC Class Codes: H01S 5/18369 based on dielectric materials
• CPC Class Codes: H01S 5/18377 comprising layers of different kind of materials, e.g. combinations of semiconducting with dielectric or metallic layers
• CPC Class Codes: H01S 5/2063 obtained by particle bombardment
• CPC Class Codes: H01S 5/3095 Tunnel junction

Claims