Endpoint detection in substrate fabrication processes

• US 6,813,534 B2
• Filed: 02/20/2002
• Issued: 11/02/2004
• Est. Priority Date: 07/10/1998
• Status: Expired due to Fees

• Current Assignee: Michael D. Welch, Nils Johansson, Paul E. Luscher, Zhifeng Sui
• Original Assignee: Michael D. Welch, Nils Johansson, Paul E. Luscher, Zhifeng Sui
• Inventors: Johansson, Nils, Sui, Zhifeng, Luscher, Paul E, Welch, Michael D
• Primary Examiner(s): Picard, Leo
• Assistant Examiner(s): Garland, Steven R.
• Application Number:
  US10/081,088
• Publication Number:
  US 20020183977A1
• Time in Patent Office: 986 Days
• Field of Search: 700/121, 709/227, 156/345.24, 156/345.25, 216/60, 216/61, 216/67, 216/59, 438/7, 438/9, 438/14, 438/16, 438/710, 438/714, 204/192.33, 204/298.32, 702/188
• US Class Current: 700/121
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H01J 37/32963 End-point detection
• CPC Class Codes: H01L 21/67253 Process monitoring, e.g. flow or thickness monitoring

Abstract

In an endpoint detection method for a process performed in a substrate processing chamber with an energized gas, a process variable of the process is detected. The process variable comprising at least one of (i) a radiation emitted by the energized gas, (ii) a radiation reflected from a substrate in the chamber, (iii) a reflected power level of the energized gas, and (iv) a temperature in the chamber. An endpoint signal is issued when the process variable is indicative of an endpoint of the process. A process parameter of the process is also detected, the process parameter comprising at least one of (i) a source power, (ii) an RF forward power, reflected power, or match components, (iii) an RF peak-to-peak voltage, current or phase, (iv) a DC bias level, (v) a chamber pressure or throttle valve position, (vi) a gas composition or flow rate, (vii) a substrate temperature or composition, (viii) a temperature of a chamber component or wall, and (ix) a magnetic confinement level or magnet position. The endpoint signal is determined to be true or false by evaluating the process parameter.

Claims

1. An endpoint detection method for a process performed in a substrate processing chamber with an energized gas, the method comprising:

(a) detecting a process variable of the process, the process variable comprising at least one of (i) a radiation emitted by the energized gas, (ii) a radiation reflected from a substrate in the chamber, (iii) a reflected power level of the energized gas, and (iv) a temperature in the chamber;

(b) issuing an endpoint signal when the process variable is indicative of an endpoint of the process;

(c) detecting a process parameter of the process, the process parameter comprising at least one of (i) a source power, (ii) an RF forward power, reflected power, or match components, (iii) an RF peak-to-peak voltage, current or phase, (iv) a DC bias level, (v) a chamber pressure or throttle valve position, (vi) a gas composition or flow rate, (vii) a substrate temperature or composition, (viii) a temperature of a chamber component or wall, and (ix) a magnetic confinement level or magnet position; and

(d) determining if the endpoint signal is true or false by evaluating the process parameter.

2. A method according to claim 1 wherein (d) comprises determining the endpoint signal is true when the process parameter is a predetermined value or is in a range of predetermined values.

3. A method according to claim 1 wherein (d) comprises evaluating the process parameter to set a fault flag if the process parameter is not a predetermined value or in a range of predetermined values, and determining the endpoint signal to be false if the endpoint signal is issued and the fault flag is set or true if the endpoint signal is issued and the fault flag is not set.

4. A method according to claim 1 comprising monitoring a plurality of the process parameters.

5. A method according to claim 4 comprising monitoring at least three process parameters.

6. A method according to claim 1 comprising transferring the detected process variable and the process parameter to a server to allow a process controller to access the process variable and the process parameter to perform steps (b) and (d).

7. A method according to claim 6 comprising separating a process controller from the server with a firewall.

8. An endpoint detection method for a process performed in a substrate processing chamber with an energized gas, the method comprising:

(a) detecting a process variable of the process, the process variable comprising at least one of (i) a radiation emitted by the energized gas, (ii) a radiation reflected from a substrate in the chamber, (iii) a reflected power level of the energized gas, and (iv) a temperature in the chamber;

(b) issuing an endpoint signal when the process variable is indicative of an endpoint of the process; and

(c) detecting a process parameter of the process, the process parameter comprising at least one of (i) a source power, (ii) an RF forward power, reflected power, or match components, (iii) an RF peak-to-peak voltage, current or phase, (iv) a DC bias level, (v) a chamber pressure or throttle valve position, (vi) a gas composition or flow rate, (vii) a substrate temperature or composition, (viii) a temperature of a chamber component or wall, and (ix) a magnetic confinement level or magnet position;

(d) evaluating the process parameter to set a fault flag if the process parameter is not a predetermined value or is not in a range of predetermined values; and

(e) determining the endpoint signal to be (i) false if the endpoint signal is issued and the fault flag is set, or (ii) true if the endpoint signal is issued and the fault flag is not set.

9. A method according to claim 8 comprising monitoring a plurality of the process parameters.

10. A method according to claim 9 comprising monitoring at least three process parameters.

11. An endpoint detection method for a process performed in a substrate processing chamber with an energized gas, the method comprising:

(a) detecting an intensity of (i) a radiation from the energized gas, or (ii) a radiation reflected from a substrate in the chamber;

(b) determining if the intensity of the radiation corresponds to a first value or is in a first range of values;

(c) detecting a process parameter of the process performed in the chamber;

(d) determining if the process parameter is in a second range of values corresponding to a response coefficient in the equation;

$\frac{\mathrm{\Delta <br><br>}<br><br>\text{\hspace{1em}<br><br>}<br><br>I<br><br>\left(\mathrm{\lambda <br><br>}\right)}{I<br><br>\left(\mathrm{\lambda <br><br>}\right)}=A_R<br><br>\frac{\mathrm{\Delta <br><br>}<br><br>\text{\hspace{1em}<br><br>}<br><br>R}{R}+A_P<br><br>\frac{\mathrm{\Delta <br><br>}<br><br>\text{\hspace{1em}<br><br>}<br><br>P}{P}+A_{\mathrm{F1}}<br><br>\frac{\mathrm{\Delta <br><br>}<br><br>\text{\hspace{1em}<br><br>}<br><br>F_1}{F_1}+A_{\mathrm{F2}}<br><br>\frac{\mathrm{\Delta <br><br>}<br><br>\text{\hspace{1em}<br><br>}<br><br>F_2}{F_2}+A_{\mathrm{F3}}<br><br>\frac{\mathrm{\Delta <br><br>}<br><br>\text{\hspace{1em}<br><br>}<br><br>F_3}{F_3},$

 

where R is an RF power applied to the energized gas, P is a pressure of the gas in the chamber, F1, F2, and F3 are gas flow rates, and AR, AP, AF1, AF2,and AF3 are their respective response coefficients; and

(e) determining if an endpoint of the process is reached when the radiation intensity is in the first range of values and the process parameter is in the second range of values.

12. A method according to claim 11 comprising monitoring a plurality of the process parameters.

13. A method according to claim 12 comprising monitoring at least three process parameters.

14. A method according to claim 11 comprising detecting a process parameter comprising at least one of (i) a source power, (ii) an RF forward power, reflected power, or match components, (iii) an RF peak-to-peak voltage, current or phase, (iv) a DC bias level, (v) a chamber pressure or throttle valve position, (vi) a gas composition or flow rate, (vii) a substrate temperature or composition, (viii) a temperature of a chamber component or wall, and (ix) a magnetic confinement level or magnet position.

15. An endpoint detection apparatus for detecting an endpoint of a process performed in a substrate processing chamber with an energized gas, the apparatus comprising:

(a) one or more detectors to detect;

(1) a process variable of the process, the process variable comprising at least one of (i) a radiation emitted by the energized gas, (ii) a radiation reflected from a substrate in the chamber, (ii) a reflected power level of the energized gas, and (iv) a temperature in the chamber; and

(2) a process parameter of the process, the process parameter comprising at least one of (i) a source power, (ii) an RF forward power, reflected power, or match components, (iii) an RF peak-to-peak voltage, current or phase, (iv) a DC bias level, (v) a gas pressure or throttle valve position, (vi) a gas composition or flow rate, (vii) a substrate temperature or composition, (viii) a temperature of a chamber component or wall, and (ix) a magnetic confinement level or magnet position; and

(b) a controller adapted to;

(1) issue an endpoint signal when the process variable is indicative of an endpoint of the process; and

(2) determine if the endpoint signal is true or false by evaluating the process parameter.

16. An apparatus according to claim 15 wherein the controller determines the endpoint signal to be true when the process parameter is a predetermined value or is in a range of predetermined values.

17. An apparatus according to claim 15 wherein the controller evaluates the process parameter to set a fault flag if the process parameter is not a predetermined value or in a range of predetermined values, and determines the endpoint signal to be (i) false if the endpoint signal is issued and the fault flag is set, or (ii) true if the endpoint signal is issued and the fault flag is not set.

18. An apparatus according to claim 15 wherein the detectors monitor a plurality of the process parameters.

19. An apparatus according to claim 18 wherein the detectors monitor at least three process parameters.

20. An apparatus according to claim 15 further comprising a server to receive the detected process variable and process parameter, and wherein the controller is adapted to access the server to retrieve the process variable and process parameter.

21. An apparatus according to claim 20 further comprising a firewall separating the controller from the server.

22. An endpoint detection apparatus for detecting an endpoint of a process performed in a substrate processing chamber with an energized gas, the apparatus comprising:

(a) one or more detectors to detect;

(1) a process variable of the process, the process variable comprising at least one of (i) a radiation emitted by the energized gas, (ii) a radiation reflected from a substrate in the chamber, (ii) a reflected power level of the energized gas, and (iv) a temperature in the chamber, and

(2) a process parameter of the process, the process parameter comprising at least one of (i) a source power, (ii) an RF forward power, reflected power, or match components, (iii) an RF peak-to-peak voltage, current or phase, (iv) a DC bias level, (v) a gas pressure or throttle valve position, (vi) a gas composition or flow rate, (vii) a substrate temperature or composition, (viii) a temperature of a chamber component or wall, and (ix) a magnetic confinement level or magnet position; and

(b) a controller adapted to;

(1) issue an endpoint signal when the process variable is indicative of an endpoint of the process,

(2) evaluate the process parameter to set a fault flag if the process parameter does not correspond to a predetermined value or is in a range of predetermined values, and

(3) determine the endpoint signal to be (i) false if the endpoint signal is issued and the fault flag is set, or (ii) true if the endpoint signal is issued and the fault flag is not set.

23. An apparatus according to claim 22 wherein the detectors monitor a plurality of the process parameters.

24. An apparatus according to claim 23 wherein the detectors monitor at least three process parameters.

25. An apparatus according to claim 22 further comprising a server to receive the detected process variable and process parameter from the detectors, and wherein the controller is adapted to access the server to retrieve the process variable and the process parameter.

26. An endpoint detection apparatus for detecting an endpoint of a process performed in a substrate processing chamber with an energized gas, the apparatus comprising:

(a) one or more detectors to detect;

(1) an intensity of (i) a radiation from the energized gas, or (ii) a radiation reflected from a substrate in the chamber, and

(2) a process parameter of the process performed in the chamber; and

(b) a controller adapted to;

(1) determine if the intensity of the radiation corresponds to a first value or is in a first range of values,

(2) determine if the process parameter is in a second range of values corresponding to a response coefficient in the equation;

$\frac{\mathrm{\Delta <br><br>}<br><br>\text{\hspace{1em}<br><br>}<br><br>I<br><br>\left(\mathrm{\lambda <br><br>}\right)}{I<br><br>\left(\mathrm{\lambda <br><br>}\right)}=A_R<br><br>\frac{\mathrm{\Delta <br><br>}<br><br>\text{\hspace{1em}<br><br>}<br><br>R}{R}+A_P<br><br>\frac{\mathrm{\Delta <br><br>}<br><br>\text{\hspace{1em}<br><br>}<br><br>P}{P}+A_{\mathrm{F1}}<br><br>\frac{\mathrm{\Delta <br><br>}<br><br>\text{\hspace{1em}<br><br>}<br><br>F_1}{F_1}+A_{\mathrm{F2}}<br><br>\frac{\mathrm{\Delta <br><br>}<br><br>\text{\hspace{1em}<br><br>}<br><br>F_2}{F_2}+A_{\mathrm{F3}}<br><br>\frac{\mathrm{\Delta <br><br>}<br><br>\text{\hspace{1em}<br><br>}<br><br>F_3}{F_3},$

 

where R is an RF power applied to the energized gas, P is a pressure of the gas in the chamber, F1, F2, and F3 are gas flow rates, and AR, AP, AF1, AF2,and AF3 are their respective response coefficients, and

(3) determine if an endpoint of the process is reached when the radiation intensity is the first value or is in the first range of values, and the process condition is in the second range of values.

27. An apparatus according to claim 26 wherein the detectors detect a process parameter comprising at least one of (i) a source power, (ii) an RF forward power, reflected power, or match components, (iii) an RF peak-to-peak voltage, current or phase, (iv) a DC bias level, (v) a gas pressure or throttle valve position, (vi) a gas composition or flow rate, (vii) a substrate temperature or composition, (viii) a temperature of a chamber component or wall, and (ix) a magnetic confinement level or magnet position.

28. An apparatus according to claim 26 wherein the detectors monitor a plurality of the process parameters.

29. An apparatus according to claim 28 wherein the detectors monitor at least three process parameters.

30. An apparatus according to claim 26 further comprising a server to receive the detected radiation intensity and process parameter from the detectors, and wherein the controller is adapted to access the server to retrieve the radiation intensity and the process parameter.