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Topographically aligned layers and method for adjusting the relative alignment of layers and apparatus therefor

  • US 6,813,574 B1
  • Filed: 11/06/2001
  • Issued: 11/02/2004
  • Est. Priority Date: 11/06/2000
  • Status: Active Grant
First Claim
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1. An alignment method comprising:

  • detecting a topology of at least one layer;

    determining an apparent location of a metrology mark;

    adjusting the apparent location of the metrology mark to determine an adjusted location of the metrology mark; and

    aligning another layer according to the adjusted location of the metrology mark, wherein adjusting the apparent location of the metrology mark adjusts for optical horizontal shift.

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