Method and apparatus for micromachines, microstructures, nanomachines and nanostructures

• US 6,813,937 B2
• Filed: 11/26/2002
• Issued: 11/09/2004
• Est. Priority Date: 11/28/2001
• Status: Expired due to Fees

• Current Assignee: Terraspan LLC
• Original Assignee: General Nanotechnology LLC
• Inventors: Kley, Victor B.
• Primary Examiner(s): Williams, Hezron
• Assistant Examiner(s): FRANK, RODNEY T
• Application Number:
  US10/305,776
• Publication Number:
  US 20030167831A1
• Time in Patent Office: 714 Days
• Field of Search: 731/05, 735/041.5, 738/626.34, 738/626.39, 738/62, 735/676.39
• US Class Current: 73/105
• CPC Class Codes: F04C 2/18 with similar tooth forms F04C2/16 takes precedence
• CPC Class Codes: F05C 2203/06 Silicon
• CPC Class Codes: F05C 2203/0882 Carbon, e.g. graphite
• CPC Class Codes: G01Q 70/10 Shape or taper
• CPC Class Codes: Y10S 977/873 Tip holder
• CPC Class Codes: Y10T 74/20582 Levers

Abstract

Parts and structures are described for micro and nano machines and the creation of macro structures with nano and micro layers of special materials to provide improved performance.

Claims

1. A cantilever assembly suitable for use in a scanning probe microscope (SPM) comprising a holder and a lever extending from the holder, the lever having a first major surface, the lever further having an end portion distal the holder, the end portion having a recessed region formed on the first major surface, the recessed region being suitable for receiving an object or serving as a mount point for an object.

2. The cantilever assembly of claim 1 further comprising one or more alignment features disposed at the end portion of the lever, the alignment features positioned relative to the recessed region.

3. The cantilever assembly of claim 2 wherein the one or more alignment are recessed surface features.

4. The cantilever assembly of claim 2 wherein the one or more alignment features are raised surface features.

5. The cantilever assembly of claim 2 wherein the one or more alignment features are a combination of raised and recessed surface features.

6. The cantilever assembly of claim 1 having an overall area equal to or less than 3 mm².