Method and apparatus for conditioning a gas flow to improve a rate of pressure change measurement

• US 6,813,943 B2
• Filed: 03/19/2003
• Issued: 11/09/2004
• Est. Priority Date: 03/19/2003
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Smith, John A., Shajii, Ali
• Primary Examiner(s): Lefkowitz, Edward
• Assistant Examiner(s): Mack, Corey D.
• Application Number:
  US10/391,829
• Publication Number:
  US 20040182148A1
• Time in Patent Office: 601 Days
• Field of Search: 731/99, 732/23, 738/615.2, 702/45, 702/189, 702/190, 702/191, 137/487.5
• US Class Current: 73/199
• CPC Class Codes: G01F 1/34 by measuring pressure or differential pressure
• CPC Class Codes: G05D 7/0186 without moving parts
• CPC Class Codes: G05D 7/0647 the plurality of throttling means being arranged in series

Abstract

An apparatus for conditioning a gas flow to improve a measurement of rate of pressure change associated with the gas flow includes a measurement chamber having an interior portion characterized by an internal volume, and an inlet port for receiving the gas flow. The apparatus includes a pressure sensor and a signal processor. The signal processor receives and samples the pressure signal from the sensor, and calculates a time derivative of the pressure signal. The apparatus also includes an inlet damper disposed at the inlet port, so that the gas flow passes through the inlet damper prior to passing into the measurement chamber. The inlet damper modifies the gas flow according to a damper transfer function. The chamber volume and the damper transfer function are selected so as to the frequencies associated with variations of the pressure in the measurement chamber to a predetermined fraction of the sampling frequency.

Claims

1. An apparatus for conditioning a gas flow to improve a measurement of rate of pressure change associated with the gas flow, comprising:

a measurement chamber having an interior portion characterized by an internal volume, and an inlet port for receiving the gas flow;

a pressure sensor for sensing a pressure within the interior portion of measurement chamber and for producing a pressure signal corresponding the pressure within the measurement chamber;

a signal processor for receiving, sampling the pressure signal at a sampling frequency and filtering the pressure signal so as to produce a sampled pressure signal, and for calculating a time derivative of the sampled pressure signal; and

,

an inlet damper disposed at the inlet port, constructed and arranged such that the gas flow passes, at least partially, through the inlet damper prior to passing through the inlet port and into the measurement chamber, wherein the inlet damper modifies one or more characteristics of the gas flow as a function of a pressure drop across the inlet damper, according to a damper transfer function;

wherein the internal volume and the damper transfer function are selected so as to limit a frequency associated with variations of the pressure within the measurement chamber to a predetermined fraction of the sampling frequency.

2. An apparatus according to claim 1, wherein the pressure sensor is disposed within the interior portion of the measurement chamber.

3. An apparatus according to claim 1, wherein the pressure sensor is disposed at the inlet port, and produces a pressure signal corresponding to an inlet flow pressure.

4. An apparatus according to claim 1, wherein the damper transfer function describes a linear relationship between (i) the pressure drop across the inlet damper and (ii) the gas flow through the inlet damper.

5. An apparatus according to claim 1, wherein the damper transfer function describes a non-linear relationship between (i) the pressure drop across the inlet damper and (ii) the gas flow through the inlet damper.

6. An apparatus according to claim 1, wherein the predetermined fraction of the sampling frequency corresponds to a performance limit associated with the signal processor for calculating a time derivative of the sampled pressure signal.

7. An apparatus according to claim 1, wherein the predetermined fraction of the sampling frequency is about 0.4.

8. An apparatus according to claim 1, further including:

a flow sensor for measuring the gas flow through the inlet port and for producing a flow signal corresponding to the gas flow through the inlet port;

an outlet port on the measurement chamber for passing an outlet gas flow; and

,

a valve disposed at the outlet port for controlling the outlet gas flow;

wherein the signal processor (i) combines the flow signal with the time derivative of the sampled pressure signal so as to produce an estimate of the outlet gas flow, and (ii) controls the valve as a function of the estimate, so as to produce a substantially constant outlet gas flow.

9. An apparatus according to claim 8, wherein the damper is disposed before the flow sensor.

10. An apparatus according to claim 8, wherein the damper is disposed after the flow sensor, and before the pressure sensor.

11. A method of conditioning a gas flow to improve a measurement of rate of pressure change associated with the gas flow, comprising:

providing a measurement chamber having an interior portion characterized by an internal volume, and an inlet port for receiving the gas flow;

sensing a pressure within the interior portion of measurement chamber and producing a pressure signal corresponding the pressure within the measurement chamber;

sampling the pressure signal at a sampling frequency and filtering the pressure signal so as to produce a sampled pressure signal, and calculating a time derivative of the sampled pressure signal;

damping the gas flow through the inlet port via an inlet damper disposed at the inlet port, so as to modify one or more characteristics of the gas flow as a function of a pressure drop across the inlet damper, according to a damper transfer function; and

,

selecting the internal volume and the damper transfer function so as to limit a frequency associated with variations of the pressure within the measurement chamber to a predetermined fraction of the sampling frequency.

12. A method according to claim 11, further including disposing the pressure sensor within the interior portion of the measurement chamber.

13. A method according to claim 11, further including disposing the pressure sensor at the inlet port, such that the pressure sensor produces a pressure signal corresponding to an inlet flow pressure.

14. A method according to claim 11, further including providing a damper transfer function that describes a linear relationship between (i) the pressure drop across the inlet damper and (ii) the gas flow through the inlet damper.

15. A method according to claim 11, further including providing a damper transfer function that describes a non-linear relationship between (i) the pressure drop across the inlet damper and (ii) the gas flow through the inlet damper.

16. A method according to claim 11, further including selecting the internal volume and the damper transfer function so as to limit a frequency associated with variations of the pressure within the measurement chamber to a predetermined fraction of the sampling frequency corresponding to a performance limit associated with the signal processor for calculating a time derivative of the sampled pressure signal.

17. A method according to claim 11, further including selecting the internal volume and the damper transfer function so as to limit a frequency associated with variations of the pressure within the measurement chamber to a predetermined fraction of the sampling frequency of about 0.4 of the sampling frequency.

18. A method according to claim 11, further including:

measuring the gas flow through the inlet port and for producing a flow signal corresponding to the gas flow through the inlet port;

providing an outlet port on the measurement chamber for passing an outlet gas flow; and

,

combining the flow signal with the time derivative of the sampled pressure signal so as to produce an estimate of the outlet gas flow; and

,

controlling the outlet gas flow at the outlet port as a function of the estimate, so as to produce a substantially constant outlet gas flow.

19. A method according to claim 18, further including disposing the damper before the flow sensor.

20. A method according to claim 18, further including disposing the damper after the flow sensor, and before the pressure sensor.