Electroless copper deposition apparatus

• US 6,815,349 B1
• Filed: 10/18/2002
• Issued: 11/09/2004
• Est. Priority Date: 10/19/2001
• Status: Active Grant

• Current Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Original Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Inventors: Stowell, R. Marshall, Biggs, Kevin, Fetters, Wayne, Minshall, Edmund B.
• Primary Examiner(s): Zarneke, David A.
• Assistant Examiner(s): Harrison, Monica D.
• Application Number:
  US10/274,837
• Time in Patent Office: 753 Days
• Field of Search: 438/17, 438/678, 239/703, 118/696
• US Class Current: 438/678
• CPC Class Codes: C23C 18/1617 Purification and regeneration of coating baths
• CPC Class Codes: C23C 18/1669 Agitation, e.g. air introduction
• CPC Class Codes: C23C 18/1675 Process conditions
• CPC Class Codes: C23C 18/1676 Heating of the solution
• CPC Class Codes: C23C 18/168 Control of temperature, e.g. temperature of bath, substrate
• CPC Class Codes: C23C 18/1692 Heat-treatment
• CPC Class Codes: C23C 18/40 using reducing agents
• CPC Class Codes: H01L 21/288 from a liquid, e.g. electrolytic deposition
• CPC Class Codes: H01L 21/76843 formed in openings in a dielectric
• CPC Class Codes: H01L 21/76864 Thermal treatment
• CPC Class Codes: H01L 21/76868 Forming or treating discontinuous thin films, e.g. repair, enhancement or reinforcement of discontinuous thin films
• CPC Class Codes: H01L 21/76873 for electroplating
• CPC Class Codes: H01L 2221/1089 Stacks of seed layers
• CPC Class Codes: Y10S 977/89 Deposition of materials, e.g. coating, cvd, or ald

Abstract

An apparatus for holding work pieces during electroless plating has certain improved features designed for use at relatively high temperatures (e.g., at least about 50 degrees C.). Cup and cone components of a “clamshell” apparatus that engage a work piece are made from dimensionally stable materials with relatively low coefficients of thermal expansion. Further, O-rings are removed from positions that come in contact with the work piece. This avoids the difficulty caused by O-rings sticking to work piece surfaces during high temperature processing. In place of the O-ring, a cantilever member is provided on the portion of the cone that contacts the work piece. Still further, the apparatus makes use of a heat transfer system for controlling the temperature of the work piece backside during plating.

Claims

1. An apparatus for engaging a work piece during plating, the apparatus comprising:

a cup having a circumferential side wall defining an interior region and a lip within the interior region arranged such that lip can support the work piece while the work piece remains within the interior region;

a cone having a work piece contact surface that fits within the cup'"'"'s interior and can contact the work piece in a manner that holds the work piece in a fixed position against the cup'"'"'s lip;

a circumferential cantilever member provided on the contact surface, which cantilever member elastically deflects holding the work piece in said fixed position.

2. The apparatus of claim 1, further comprising a contact feature protruding from a distal end region of the circumferential cantilever member and pointing toward the cup, whereby the contact feature is the first portion of the cone to contact the work piece during engagement of the work piece.

3. The apparatus of claim 2, wherein the contact feature is a circumferential ridge on the circumferential cantilever member.

4. The apparatus of claim 1, further comprising a circumferential slot located proximate the contact surface of the cone, thereby defining the circumferential cantilever member.

5. The apparatus of claim 1, wherein the circumferential cantilever member and the work piece contact surface of the cone form a monolithic element.

6. The apparatus of claim 1, further comprising an O-ring disposed against the circumferential cantilever member in a manner imparting a return force when the work piece is held in said fixed position.

7. The apparatus of claim 6, further comprising a circumferential slot located proximate the contact surface of the cone, thereby defining the circumferential cantilever member, wherein the O-ring resides in the circumferential slot.

8. The apparatus of claim 1, wherein the cone is made from a material selected from the group consisting of PPS and PEEK.

9. The apparatus of claim 1, further comprising one or more actuators for moving the work piece into and out of a plating fluid, while the work piece is held in said fixed position by the cup and cone.

10. A method of depositing a material onto a work piece, the method comprising:

loading a work piece onto a cup having a circumferential side wall defining an interior region and a lip within the interior region arranged such that lip can support the work piece while the work piece remains within the interior region, wherein the work piece has an exposed surface opposite the cup;

engaging the exposed surface of the work piece with a cone having a work piece contact surface that fits within the cup'"'"'s interior and can contact the work piece in a manner that holds the work piece in a fixed position against the cup'"'"'s lip, wherein a circumferential cantilever member provided on the contact surface elastically deflects while holding the work piece in said fixed position; and

plating a metal onto said work piece while engaged by said cup and cone.

11. The method of claim 10, wherein the plating is electroless plating conducted at a temperature of at least about 50 degrees C.

12. The method of claim 10, further comprising immersing the work piece in a plating fluid prior to plating.

13. The method of claim 10, wherein work piece is a semiconductor wafer.

14. The method of claim 10, wherein the work piece is positioned on a lipseal of the lip to thereby provide a fluid tight seal with the work piece when the work piece is held in place by the cone.

15. The method of claim 10, wherein the circumferential cantilever member comprises a contact feature protruding from a distal end region of the circumferential cantilever member and pointing toward the cup, whereby the contact feature is the first portion of the cone to contact the work piece during the engaging of the work piece.

16. The method of claim 15, wherein the contact feature is a circumferential ridge on the circumferential cantilever member.

17. The method of claim 10, wherein an O-ring is disposed against the circumferential cantilever member in a manner imparting a return force when the work piece is held in said fixed position.

18. The method of claim 10, further comprising moving the work piece into and out of a plating fluid, while the work piece is held in position by the cup and cone.

19. An apparatus for engaging a work piece during plating, the apparatus comprising:

a cup having a circumferential side wall defining an interior region and a lip within the interior region arranged such that lip can support the work piece while the work piece remains within the interior region;

a cone having a work piece contact surface that fits within the cup'"'"'s interior and can contact the work piece in a manner that holds the work piece in a fixed position against the cup'"'"'s lip; and

a heating element in said cone,

wherein the cone'"'"'s contact region is shaped to form a heat transfer fluid pathway between the work piece and the contact surface when the work piece is in the fixed position.

20. The apparatus of claim 19, further comprising:

a heat transfer fluid inlet in the cone; and

a heat transfer fluid outlet in the cone.

21. The apparatus of claim 20, wherein the heat transfer fluid inlet and outlet are configured for handling a liquid or a gas heat transfer fluid.

22. The apparatus of claim 21, wherein the heat transfer fluid inlet and outlet are configured for handling helium as the heat transfer fluid.

23. The apparatus of claim 19, wherein the cone'"'"'s contact region is shaped such that the heat transfer fluid pathway has a height of between about 100 and 700 micrometers.

24. The apparatus of claim 19, wherein the cone'"'"'s contact region includes at least one protruding contact feature pointing toward the cup, whereby the contact feature is the first portion of the cone to contact the work piece during engagement of the work piece and thereby forms the heat transfer fluid pathway.

25. The apparatus of claim 19, wherein the heating element comprises an electrically resistive, thermoelectric, and/or radiative element.

26. A method of depositing a material onto a work piece, the method comprising:

loading a work piece onto a cup having a circumferential side wall defining an interior region and a lip within the interior region arranged such that lip can support the work piece while the work piece remains within the interior region, wherein the work piece has an exposed surface opposite the cup;

engaging the exposed surface of the work piece with a cone having a work piece contact surface that fits within the cup'"'"'s interior and can contact the work piece in a manner that holds the work piece in a fixed position against the cup'"'"'s lip;

plating a metal onto said work piece while engaged by said cup and cone; and

passing or maintaining a heat transfer fluid along the exposed surface of the work piece during plating.

27. The method of claim 26, further comprising heating or cooling the heat transfer fluid with a heating or cooling element provided within the cone.

28. The method of claim 26, further comprising:

introducing the heat transfer fluid to a heat transfer fluid inlet in the cone; and

removing the heat transfer fluid via a heat transfer fluid outlet in the cone.

29. The method of claim 26, wherein the heat transfer fluid passes through a heat transfer fluid pathway between the cone'"'"'s contact region and the work piece exposed surface.

30. The method of claim 29, wherein the heat transfer fluid pathway has a height of between about 100 and 500 micrometers.

31. An apparatus for engaging a work piece during plating, the apparatus comprising:

a cup having a circumferential side wall defining an interior region and a lip within the interior region arranged such that lip can support the work piece while the work piece remains within the interior region;

a cone having a work piece contact surface that fits within the cup'"'"'s interior and can contact the work piece in a manner that holds the work piece in a fixed position against the cup'"'"'s lip; and

a heat transfer element, located external to the cone, for heating or cooling a heat transfer fluid,

wherein the cone'"'"'s contact region is shaped to form a heat transfer fluid pathway between the work piece and the contact surface when the work piece is in the fixed position.