Single metal pixel array for light valve utilizing lateral sublithographic spacer isolation

• US 6,816,224 B1
• Filed: 07/24/2001
• Issued: 11/09/2004
• Est. Priority Date: 03/04/1999
• Status: Expired due to Term

• Current Assignee: National Semiconductor Corporation (Texas Instruments, Inc.)
• Original Assignee: National Semiconductor Corporation (Texas Instruments, Inc.)
• Inventors: Gregory, Haydn James
• Primary Examiner(s): Chowdhury, Tarifur R.
• Assistant Examiner(s): CHUNG, DAVID Y
• Application Number:
  US09/912,207
• Time in Patent Office: 1,204 Days
• Field of Search: 349/146, 349/139, 349/143, 349/145, 349/156
• US Class Current: 349/146
• CPC Class Codes: G02F 1/133553 Reflecting elements associated to illuminating devices G02F1/133605

Abstract

A pixel cell array of a light valve does not rely upon photolithography to define inter-pixel spacing. Instead, adjacent pixels of the array are electronically insulated from one another by spacers formed by etching a dielectric layer conforming to sidewalls of a patterned sacrificial layer. Removal of the sacrificial layer, followed by formation of a metal layer over the dielectric spacer structures and chemical-mechanical polishing of the metal layer, completes fabrication of the array. The thickness of the spacer sidewalls, and hence inter-pixel spacing, is determined by the rate of formation of the conforming dielectric layer. This rate can be precisely controlled to produce spacer structures having a thickness of less than the minimum linewidth of a given photolithography system. In this manner, pixel arrays having significantly reduced inter-pixel spacing and correspondingly higher cell densities can be created. Arrays with even greater pixel densities can be created with low-k dielectric materials used to form the dielectric layer and the resulting spacer structures.

Claims

1. An apparatus including an array of pixel cells for a light valve, the apparatus comprising:

an array of pixel cells arranged in a checkerboard pattern having a first set of squares alternating with a second set of squares, such that pixel cells in the first set of squares are diagonally adjacent pixel cells in the second set of squares, diagonally adjacent pixel cells having a gap formed therebetween, the gap including a first edge defined by a pixel cell from the first set of squares and a second edge defined by a pixel cell from the second set of squares, the first and second edges being parallel; and

dielectric spacer structures intervening in the gaps between the first set of squares and the second set of squares, the dielectric spacer structures being approximately 0.05 μ

m thick.

2. The apparatus according to claim 1, and wherein the dielectric spacer structures comprise silicon oxide.

3. The apparatus according to claim 1, and wherein the dielectric spacer structures comprise silicon nitride.

4. The apparatus according to claim 1, and wherein the dielectric spacer structures comprise a low-k dielectric material selected from the group consisting of fluorosilicate glass, nanoporous silica, and organic polymers.

5. An apparatus including an array of pixel cells for a light valve, the apparatus comprising:

an array of pixel cells arranged in a checkerboard pattern having a first set of squares alternating with a second set of squares, such that pixel cells in the first set of squares are diagonally adjacent pixel cells in the second set of squares, diagonally adjacent pixel cells having a gap formed therebetween, the gap including a first edge defined by a pixel cell from the first set of squares and a second edge defined by a pixel cell from the second set of squares, the first and second edges being parallel; and

dielectric spacer structures intervening in the gaps between the first set of squares and the second set of squares, the dielectric spacer structures having a lower portion and a curved upper portion.

6. An apparatus as in claim 5, and wherein the lower portion is approximately 0.05 μ

m thick.