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Single metal pixel array for light valve utilizing lateral sublithographic spacer isolation

  • US 6,816,224 B1
  • Filed: 07/24/2001
  • Issued: 11/09/2004
  • Est. Priority Date: 03/04/1999
  • Status: Expired due to Term
First Claim
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1. An apparatus including an array of pixel cells for a light valve, the apparatus comprising:

  • an array of pixel cells arranged in a checkerboard pattern having a first set of squares alternating with a second set of squares, such that pixel cells in the first set of squares are diagonally adjacent pixel cells in the second set of squares, diagonally adjacent pixel cells having a gap formed therebetween, the gap including a first edge defined by a pixel cell from the first set of squares and a second edge defined by a pixel cell from the second set of squares, the first and second edges being parallel; and

    dielectric spacer structures intervening in the gaps between the first set of squares and the second set of squares, the dielectric spacer structures being approximately 0.05 μ

    m thick.

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