Micro-electromechanical devices and methods of manufacture

• US 6,816,301 B1
• Filed: 06/06/2002
• Issued: 11/09/2004
• Est. Priority Date: 06/29/1999
• Status: Expired due to Term

• Current Assignee: Regents Of The University Of Minnesota Mcnamara Alumni Center
• Original Assignee: Regents of The University of Minnesota (University of Minnesota)
• Inventors: Schiller, Peter J.
• Primary Examiner(s): Schwartz, Jordan M.
• Assistant Examiner(s): STULTZ, JESSICA T
• Application Number:
  US10/019,521
• Time in Patent Office: 887 Days
• Field of Search: 359/290, 359/291, 359/295, 359/302, 359/311, 737/20--3, 737/15, 216/2, 438/53
• US Class Current: 359/290
• CPC Class Codes: B81B 2201/0264 Pressure sensors
• CPC Class Codes: B81B 2203/0127 Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
• CPC Class Codes: B81B 2203/0315 Cavities
• CPC Class Codes: B81B 3/0075 For improving wear resistance
• CPC Class Codes: B81C 2201/0109 Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108

Abstract

Micro-eletromechanical devices, substrate assemblies from which the devices can be manufactured, and methods to manufacture the devices are disclosed. The invention combines the advantages of conventional surface and bulk micromachining processes using a sacrificial layer to create an integrated micro-electromechanical system (MIEMS) technology that provides high performance, high yield, and manufacturing tolerance. The devices manufactured according to the present invention include, but are not limited to, pressure sensors, vibration sensors, accelerometers, gas or liquid pumps, flow sensor, resonant devices, and infrared detectors.

Claims

1. A method of manufacturing a micro-electromechanical device having front and back sides, the method comprising:

providing a substrate comprising a first side located proximate the front side of the device and second side proximate the back side of the device;

providing sacrificial material on a selected area of the first side of the substrate, wherein the sacrificial material is reflowable;

providing a diaphragm layer on the sacrificial material and the first side of the substrate surrounding the sacrificial material in the selected area;

providing at least one transducer on the front side of the device, the transducer located over the sacrificial material, wherein the transducer comprises transducing material and electrical contacts in electrical communication with the transducing material;

forming a void in the substrate from the second side of the substrate towards the first side of the substrate after providing the transducer on the front side of the device, wherein at least a portion of the sacrificial material is exposed within the void proximate the first side of the substrate; and

removing at least a portion of the sacrificial material through the void, wherein a portion of the diaphragm layer is suspended directly above the substrate within the selected area;

wherein the method further comprises reflowing the sacrificial material.

2. A method according to claim 1, wherein the suspended portion of the diaphragm layer and the substrate form an included angle at their junction of less than 90 degrees.

3. A method according to claim 1, wherein the void is formed by etching through the substrate while the electrical contacts are exposed on the front side of the device.

4. A method according to claim 1, wherein the electrical contacts are metallic, and wherein the void is formed by etching through the substrate while the metallic electrical contacts are exposed on the front side of the device.

5. A method according to claim 1, wherein removing the sacrificial material comprises selectively etching the sacrificial material.

6. A method according to claim 5, wherein removing the sacrificial material comprises selectively etching the sacrificial material by exposing only the back side of the device to an etchant.

7. A method according to claim 6, wherein the etchant is in a gas phase.

8. A method according to claim 1, wherein providing the sacrificial material comprises depositing a layer of the sacrificial material on the first side of the substrate in the selected area.

9. A method according to claim 8, wherein the first side of the substrate is planar.

10. A method according to claim 1, wherein the void comprises an opening within the selected area on the first side of the substrate that is smaller than the selected area occupied by the sacrificial material.

11. A method according to claim 1, wherein forming the void in the substrate further comprises forming a proof mass attached to the diaphragm layer, the proof mass comprising a portion of the substrate that is separated therefrom.

12. A method according to claim 11, wherein the void is in the shape of an annular ring and the proof mass is cylindrical.

13. A method according to claim 11, wherein the suspended portion of the diaphragm layer and the proof mass form an included angle at their junction of less than 90 degrees.

14. A substrate assembly having front and back sides, the assembly comprising:

a substrate comprising a first side located proximate the front side of the device and second side proximate the back side of the substrate assembly;

sacrificial material on the first side of the substrate in a plurality of selected areas, wherein the sacrificial material comprises reflowed sacrificial material;

a diaphragm layer covering the sacrificial material in the selected are the diaphragm layer extending to cover the first side of the substrate surrounding the sacrificial material in the selected areas;

a plurality of transducers on the front side of the device, each of the transducers located over at least a portion of each of the selected areas, wherein the transducer comprises transducing material and electrical contacts in electrical communication with the transducing material;

wherein the sacrificial material in the selected areas is encapsulated between the substrate and the diaphragm layer.

15. An assembly according to claim 14, wherein the diaphragm layer and the substrate form an included angle at edges of the sacrificial material in the selected areas of less than 90 degrees.

16. An assembly according to claim 14, wherein the electrical contacts are metallic.

17. An assembly according to claim 14, wherein the sacrificial material is selectively removable with respect to the diaphragm layer and the substrate.

18. An assembly according to claim 14, wherein the sacrificial material comprises a layer deposited on the first side of the substrate in the selected areas.

19. An assembly according to claim 14, wherein the first side of the substrate is planar.

20. An assembly according to claim 14, wherein the sacrificial material comprises glass.