Method for processing the surface of a workpiece
First Claim
1. A method for treating processing a workpiece, comprising the steps of:
- loading the workpiece into a chamber;
supplying steam into the chamber;
allowing at least some of the steam to condense as a liquid on a surface of the workpiece, to form a layer of liquid on the workpiece, and with the condensing steam heating the workpiece; and
introducing ozone gas into the chamber with the ozone gas moving via diffusion, through the liquid layer, and to a liquid/solid interface at the surface of the workpiece, where the ozone chemically reacts, to process the workpiece.
3 Assignments
0 Petitions
Accused Products
Abstract
An apparatus for supplying a mixture of a treatment liquid and ozone for treatment of a surface of a workpiece, and a corresponding method are set forth. The preferred embodiment of the apparatus comprises a liquid supply line that is used to provide fluid communication between a reservoir containing the treatment liquid and a treatment chamber housing the workpiece. A heater is disposed to heat the workpiece, either directly or indirectly. Preferably, the workpiece is heated by heating the treatment liquid that is supplied to the workpiece. One or more nozzles accept the treatment liquid from the liquid supply line and spray it onto the surface of the workpiece while an ozone generator provides ozone into an environment containing the workpiece.
71 Citations
26 Claims
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1. A method for treating processing a workpiece, comprising the steps of:
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loading the workpiece into a chamber;
supplying steam into the chamber;
allowing at least some of the steam to condense as a liquid on a surface of the workpiece, to form a layer of liquid on the workpiece, and with the condensing steam heating the workpiece; and
introducing ozone gas into the chamber with the ozone gas moving via diffusion, through the liquid layer, and to a liquid/solid interface at the surface of the workpiece, where the ozone chemically reacts, to process the workpiece. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for treating a workpiece, comprising the steps of:
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placing the workpiece into a chamber;
introducing steam into the chamber;
heating the workpiece with the steam;
allowing at least some steam to condense on a surface of the workpiece to form a heated liquid boundary layer on the surface of the workpiece with the condensing steam contributing to heating the workpiece;
introducing ozone gas into the chamber;
diffusing the ozone gas through the heated liquid boundary layer; and
reacting the ozone at the surface of the workpiece. - View Dependent Claims (11, 12, 13, 14)
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15. A method for processing a workpiece to remove material from a surface of the workpiece, comprising the steps of:
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condensing steam on the workpiece surface that is to be treated to form a liquid boundary layer that allows diffusion of ozone therethrough for reaction with the material at a liquid-solid interface between the liquid boundary layer and the material, with the steam adding heat to the workpiece and assisting in maintaining the workpiece at an elevated temperature; and
introducing gaseous ozone to the environment around the workpiece under conditions in which the ozone diffuses through the boundary layer and reacts with the material. - View Dependent Claims (16, 17, 18, 19)
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20. A method for treating a workpiece, comprising the steps of:
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loading the workpiece into a chamber;
pressurizing the chamber;
supplying steam into the pressurized chamber;
allowing at least some of the steam to condense as a liquid on a surface of the workpiece, to form a layer of liquid on the workpiece; and
introducing ozone gas into the chamber.
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21. A method for treating a workpiece, comprising the steps of:
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loading the workpiece into a chamber;
adding at least one of ammonium hydroxide, an acid hydroxide, sulfuric acid, hydrochloric acid, and hydrofluoric acid to steam;
supplying the steam into the, chamber;
allowing at least some of the steam to condense as a liquid on a surface of the workpiece, to form a layer of liquid on the workpiece; and
introducing ozone gas into the chamber.
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22. A method for treating a workpiece, comprising the steps of:
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placing the workpiece into a chamber;
introducing steam into the chamber;
heating the workpiece with the steam;
allowing steam to condense on a surface of the workpiece to form a heated liquid boundary layer on the surface of the workpiece;
introducing ozone gas into the chamber;
diffusing the ozone gas through the heated liquid boundary layer; and
reacting the ozone at the surface of the workpiece wherein the chamber is pressurized to at least 35 psia.
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23. A method for processing a workpiece, comprising the steps of:
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loading the workpiece into a chamber;
providing steam into the chamber;
allowing at least some of the steam to condense as a liquid on a surface of the workpiece, to form a layer of liquid on the workpiece and with the condensing steam heating the surface of the workpiece;
rotating the workpiece within the chamber; and
providing ozone gas into the chamber, with the ozone gas diffusing through the layer of liquid and chemically reacting at the surface of the workpiece, to process the workpiece. - View Dependent Claims (24, 25)
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26. A method for processing a workpiece, comprising the steps of:
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loading the workpiece into a chamber;
supplying steam into the chamber;
allowing at least some of the steam to condense as a liquid on a surface of the workpiece, to form a layer of liquid on the workpiece, and with the condensing steam heating the workpiece; and
introducing ozone as a dry gas into the chamber separately from the steam.
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Specification