Hidden hinge digital micromirror device with improved manufacturing yield and improved contrast ratio

• US 6,819,470 B2
• Filed: 02/06/2003
• Issued: 11/16/2004
• Est. Priority Date: 09/29/2000
• Status: Active Grant

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Meier, Robert E., Huffman, James D.
• Primary Examiner(s): Epps, Georgia
• Assistant Examiner(s): CHOI, WILLIAM C
• Application Number:
  US10/359,754
• Publication Number:
  US 20030117688A1
• Time in Patent Office: 649 Days
• Field of Search: 359/198, 359/214, 359/223-225, 359/290, 359/291, 359/295, 359/298, 359/900
• US Class Current: 359/291
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

An improved DMD type spatial light modulator having an array of pixels (18). The pixels (18) are of the “hidden hinge” design, each pixel having a mirror (30) supported over a hinged yoke (32). Addressing electrodes (26, 28) on an underlying metallization layer and addressing electrodes (50, 52) at the yoke level provide electrostatic forces that cause the mirrors to tilt and then to return to their flat state. The pixels (18) are designed to provide increased clearance between the leading edge of the yoke (32) and the underlying metallization layer when the mirrors (30) are tilted. Various features of the improved pixel (18) also improve the contrast ratio of images generated by the DMD.

Claims

1. A method of constructing an array of mirrors, such that each mirror is individually rotateable into at least two states, comprising the steps of:

constructing a metallization layer for electrostatically addressing the mirrors of the array;

constructing a yoke layer in a plane separate from the plane of the metallization layer, the yoke layer comprising at least a yoke for supporting each mirror, and a hinge for supporting the yoke over the metallization layer, wherein the hinge permits the yoke to tilt in response to electrostatic addressing, and further comprising a pair of springtips at each leading edge of the yoke, the springtips operable to land on the metallization layer when the mirror is tilted; and

constructing a mirror layer in which the mirrors are fabricated;

increasing the spacing between the springtips of each springtip pair and the height of the yoke for optimal performance;

wherein the optimal performance provides increased clearance between the addressing circuitry first portion and the leading edge of the yoke without significant comprise to electrostatic performance.

2. The method of claim 1, further comprising the step of increasing the span between the base of each springtip and the leading edge for providing said optimal performance.

3. The method of claim 1, further comprising the step of increasing the width of the leading edge.

4. The method of claim 1, further comprising the step of fabricating a rounded hinge support post on the metallization layer.

5. The method of claim 1, wherein the hinges are generally bar shaped.

6. The method of claim 1, wherein yoke layer further comprises a mirror address electrode at each corner of the mirror, whose area is decreased.

7. The method of claim 1, wherein the metallization layer has a metal area under the corner of each mirror that is decreased.

8. The method of claim 1, wherein the springtips are extended further under the corner of the mirror, for providing said optimal performance.