Optical differential pressure sensor
First Claim
1. A differential pressure sensor, comprising:
- a pressure sensing element formed by encasing an optical waveguide in an elastically deformable medium;
a plate coupled with the pressure sensing element;
bellows attached to the plate, wherein the pressure sensing element is located at least partially within the bellows; and
a housing surrounding the plate and bellows, the housing having a first port to receive a first pressure directed to the first face of the plate and a second port to receive a second pressure directed to a second opposing face of the plate from within the bellows to provide movement to the plate, wherein the pressure sensing element is responsive to the movement of the plate.
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Accused Products
Abstract
A fiber grating pressure sensor includes an optical sensing element which includes an optical fiber having a Bragg grating impressed therein which is encased within and fused to at least a portion of a glass capillary tube and/or a large diameter waveguide grating having a core and a wide cladding. Light is incident on the grating and light is reflected from the grating at a reflection wavelength λ1. The sensing element may be used by itself as a sensor or located within a housing. When external pressure P increases, the grating is compressed and the reflection wavelength λ1 changes. The shape of the sensing element may have other geometries, e.g., a “dogbone” shape, so as to enhance the sensitivity of shift in λ1 due to applied external pressure and may be fused to an outer shell.
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Citations
20 Claims
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1. A differential pressure sensor, comprising:
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a pressure sensing element formed by encasing an optical waveguide in an elastically deformable medium;
a plate coupled with the pressure sensing element;
bellows attached to the plate, wherein the pressure sensing element is located at least partially within the bellows; and
a housing surrounding the plate and bellows, the housing having a first port to receive a first pressure directed to the first face of the plate and a second port to receive a second pressure directed to a second opposing face of the plate from within the bellows to provide movement to the plate, wherein the pressure sensing element is responsive to the movement of the plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A differential pressure sensor, comprising:
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a chamber defined by a housing having walls for receiving a first pressure directed to a first surface of at least one of the walls to provide a deflection of the at least one wall;
a port through the housing to receive a second pressure directed to a second surface of the at least one wall, wherein the second pressure opposes the deflection of the at least one wall; and
a pressure sensing element formed by encasing an optical waveguide in an elastically deformable tube, wherein the pressure sensing element is coupled to at least a portion of the at least one wall within the chamber and is responsive to the deflection thereof. - View Dependent Claims (10, 11, 12, 13, 14)
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15. A differential pressure sensor, comprising:
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a member for receiving a first pressure directed to a first face of the member and a second pressure directed to a second face of the member to provide a movement to the member; and
a pressure sensing element formed by encasing an optical waveguide in an elastically deformable tube having a first portion with a smaller outside diameter than two second portions disposed at each end of the first portion, wherein the pressure sensing element is coupled to the member and is responsive to the movement. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification