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Optical differential pressure sensor

  • US 6,820,489 B2
  • Filed: 08/22/2003
  • Issued: 11/23/2004
  • Est. Priority Date: 12/04/1998
  • Status: Expired due to Term
First Claim
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1. A differential pressure sensor, comprising:

  • a pressure sensing element formed by encasing an optical waveguide in an elastically deformable medium;

    a plate coupled with the pressure sensing element;

    bellows attached to the plate, wherein the pressure sensing element is located at least partially within the bellows; and

    a housing surrounding the plate and bellows, the housing having a first port to receive a first pressure directed to the first face of the plate and a second port to receive a second pressure directed to a second opposing face of the plate from within the bellows to provide movement to the plate, wherein the pressure sensing element is responsive to the movement of the plate.

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