Method and apparatus for determining the pass through flux of magnetic materials
First Claim
1. An apparatus for determining the pass through flux of a magnetic material comprising:
- at least one magnetic source including at least one ring-shaped electromagnet generating a magnetic field passing through the magnetic material;
one or more magnetic field detectors configured to measure one or more of x and y components of the magnetic field; and
a mechanism configured to move one or more of the magnetic source, magnetic field detectors, and magnetic material.
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Abstract
The invention includes an apparatus and method for determining the pass through flux of magnetic materials. The apparatus comprises one or more magnetic field sensors arranged in such a way as to collect field strength data in any or all the x, y, z directions. The apparatus also comprises a magnet field source or arrangement of magnet field sources which are placed beneath the material being characterized and includes a mechanism whereby the magnetic material can be mapped by the movement of any one or combination of: magnetic field source or sources, sensors and magnetic material. The invented method comprises the use of various configurations of magnetic sources in order to generate a magnetic field that emulates the open-loop condition found in magnetron sputtering.
12 Citations
17 Claims
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1. An apparatus for determining the pass through flux of a magnetic material comprising:
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at least one magnetic source including at least one ring-shaped electromagnet generating a magnetic field passing through the magnetic material;
one or more magnetic field detectors configured to measure one or more of x and y components of the magnetic field; and
a mechanism configured to move one or more of the magnetic source, magnetic field detectors, and magnetic material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An apparatus for determining the pass through flux of a magnetic material comprising:
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at least one magnetic source beneath the magnetic material, the magnetic source generating a magnetic field;
one or more magnetic field detectors configured to measure at least a x component of the magnetic field;
a mechanism configured to move one or more of said magnetic source, magnetic field detectors and magnetic material; and
a processor in data communication with the magnetic field detectors and configured to generate a map of pass through flux of the magnetic material.
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12. An apparatus for determining the pass through flux of a magnetic material comprising:
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at least one magnetic source beneath the magnetic material, the magnetic source generating a magnetic field;
one or more magnetic field detectors configured to measure at least a y component of the magnetic field;
a mechanism configured to move one or more of said magnetic source, magnetic field detectors and magnetic material; and
a processor in data communication with the magnetic field detectors and configured to generate a map of pass through flux of the magnetic material.
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13. A method for determining the pass through flux of a magnetic material comprising:
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generating a magnetic field on one side of the magnetic material and passing the magnetic field through the magnetic material and out an other side of the magnetic material;
collecting magnetic field vector information at the other side of the magnetic material with two or more detectors configured to measure two or mere of the x, y, and z components of the magnetic field; and
moving one or more of the magnetic field, the at least one of the two or more detectors, and the magnetic material during the collecting. - View Dependent Claims (14, 15, 16, 17)
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Specification