Semiconductor processing temperature control

• US 6,822,202 B2
• Filed: 03/15/2002
• Issued: 11/23/2004
• Est. Priority Date: 03/15/2002
• Status: Expired due to Fees

• Current Assignee: Noah Precision, LLC (Lauda Dr. R. Wobser GmbH & Co. KG.)
• Original Assignee: Oriol, Inc.
• Inventors: Atlas, Boris
• Primary Examiner(s): Hoang, Tu Ba
• Application Number:
  US10/097,603
• Publication Number:
  US 20030173351A1
• Time in Patent Office: 984 Days
• Field of Search: 219/482, 219/490, 219/494, 219/509, 219/510, 165/206, 165/294, 165/263, 165/100, 165/64, 165/80.4, 165/261, 165/254, 165/272, 425/144, 425/378.1, 264/40.6
• US Class Current: 219/494
• CPC Class Codes: G05D 23/20 with sensing elements having variation of electric or magnetic properties with change of temperature G05D23/13 takes precedence
• CPC Class Codes: H01L 21/31111 by chemical means
• CPC Class Codes: H01L 21/31133 by chemical means
• CPC Class Codes: H01L 21/67248 Temperature monitoring
• CPC Class Codes: H01L 21/76808 involving intermediate temporary filling with material

Abstract

A temperature control system having a re-circulation loop that uses valves to selectively circulate a temperature control fluid through a cooling system, through a heating system, or through a through passage so as to controlling the temperature of the temperature control fluid, which, in turn, controls the temperature of a target. A temperature sensor monitors the target'"'"'s temperature. A controller controls valve operation in response to the temperature measured by the temperature sensor to obtain a predetermined target temperature. Beneficially, the controller controls the target'"'"'s temperature according to a predetermined temperature profile. Continuous etching along a predetermined temperature profile is possible.

Claims

1. A temperature control system, comprising:

a target having a target temperature;

a temperature sensor for sensing said target temperature;

a controller operatively connected to said temperature sensor, said controller for producing cooling control signals and heating control signals;

a re-circulation loop for retaining a temperature control fluid such that the temperature control fluid is in thermal communication with said target, said re-circulation loop including;

a pump for circulating said temperature control fluid;

a cooling heat exchanger;

a cooling control valve;

a cooling fluid passage interconnecting said cooling heat exchanger and said cooling control valve;

a heating heat exchanger;

a heating control valve;

a heating fluid passage interconnecting said heating heat exchanger and said heating control valve; and

a through passage;

wherein said cooling control valve selectively enables part of said temperature control fluid to circulate through said cooling heat exchanger in response to said cooling control signals;

wherein said heating control valve selectively enables part of said temperature control fluid to circulate through said heating heat exchanger in response to said heating control signals; and

wherein said controller selectively produces said cooling control signals and said heating control signals such that said target temperature moves toward a predetermined temperature.

2. A temperature control system according to claim 1, wherein at least part of said temperature control fluid flows through said through passage.

3. A temperature control system according to claim 1, wherein said cooling passage, said heating passage, and said through passage are in parallel.

4. A temperature control system according to claim 1, wherein temperature control fluid in said cooling heat exchanger is cooled below said predetermined temperature.

5. A temperature control system according to claim 1, wherein temperature control fluid in said heating heat exchanger is heated above said predetermined temperature.

6. A temperature control system according to claim 1, wherein said target includes an etching solution.

7. A temperature control system according to claim 1, wherein said temperature sensor is in thermal communication with said target.

8. A temperature control system according to claim 1, wherein said temperature sensor is in thermal communication with temperature control fluid leaving said target.

9. A temperature control system according to claim 1, wherein said cooling heat exchanger receives a refrigerated fluid.

10. A temperature control system according to claim 1, wherein said heating heat exchanger receives a heated fluid.

11. A temperature control system according to claim 1, wherein said heating heat exchanger receives electrical power.

12. A temperature control system according to claim 1, wherein said pump forces temperature control fluid to circulate through said cooling heat exchanger, through said heating heat exchanger, and through said through passage.

13. A temperature control system according to claim 1, wherein said controller selectively produces said cooling control signals and said heating control signals such that said target temperature follows a predetermined temperature profile.

14. A temperature control system according to claim 1, wherein said controller includes a timer.

15. A temperature control system, comprising:

a heating heat exchanger;

a cooling heat exchanger;

a first target having a first target temperature;

a first temperature sensor for sensing said first target temperature;

a first re-circulation loop for retaining a first temperature control fluid such that the first temperature control fluid is in thermal communication with said first target, said first re-circulation loop including;

a first pump for circulating said first temperature control fluid;

a first cooling control valve for selectively circulating said first temperature control fluid into said cooling heat exchanger in response to a first cooling signal;

a first cooling fluid passage interconnecting said cooling heat exchanger and said first cooling control valve;

a first heating control valve for selectively circulating said first temperature control fluid into said heating heat exchanger in response to a first heating signal;

a first heating fluid passage interconnecting said heating heat exchanger and said first heating control valve; and

a first through passage;

a second target having a second target temperature;

a second temperature sensor for sensing said second target temperature;

a second re-circulation loop for retaining a second temperature control fluid such that the second temperature control fluid is in thermal communication with said second target, said second re-circulation loop including;

a second pump for circulating said second temperature control fluid;

a second cooling control valve for selectively circulating said second temperature control fluid into said cooling heat exchanger in response to a second cooling signal;

a second cooling fluid passage interconnecting said cooling heat exchanger and said second cooling control valve;

a second heating control valve for selectively circulating said second temperature control fluid into said heating heat exchanger in response to a second heating signal;

a second heating fluid passage interconnecting said heating heat exchanger and said second heating control valve; and

a second through passage; and

a controller operatively connected to said first temperature sensor and to said second temperature sensor, said controller for producing said first and second cooling signals and said first and second heating control signals such that said first target temperature and said second target temperature are at predetermined levels.

16. A temperature control system according to claim 15, wherein said first temperature control fluid and said second temperature control fluid do not mix.

17. A temperature control system according to claim 15, wherein said first target temperature and said second target temperature are independent of one another.