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Apparatus and method for fabricating flat workpieces

  • US 6,822,734 B1
  • Filed: 09/04/2001
  • Issued: 11/23/2004
  • Est. Priority Date: 11/02/1998
  • Status: Expired due to Fees
First Claim
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1. An inspection system for use in inspecting flat panel displays comprising:

  • an optical array including a staring array optical sensor for viewing a flat panel display substrate; and

    an illumination subsystem sequentially providing dark field and bright field illumination of said flat panel display substrate when said optical array views at least a part of said flat panel display substrate.

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